Monolithic waveguide/MEMS switch
First Claim
1. An optical device on a single substrate, comprising:
- a waveguide portion having at least one waveguide; and
a mirror portion fabricated on said single substrate with said waveguide portion, wherein said mirror portion includes at least one mirror that is adapted to move parallel to a plane of said at least one waveguide.
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Accused Products
Abstract
A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.
36 Citations
21 Claims
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1. An optical device on a single substrate, comprising:
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a waveguide portion having at least one waveguide; and
a mirror portion fabricated on said single substrate with said waveguide portion, wherein said mirror portion includes at least one mirror that is adapted to move parallel to a plane of said at least one waveguide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for fabricating an optical device on a single substrate, comprising the steps of:
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forming at least one waveguide in a waveguide portion of said single substrate; and
forming a mirror portion on said single substrate with said waveguide portion, wherein said mirror portion includes at least one mirror that is adapted to move parallel to a plane of said at least one waveguide. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An optical device on a single substrate, comprising:
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a waveguide portion having at least one waveguide; and
a mirror portion fabricated on said single substrate with said waveguide portion, wherein said mirror portion includes at least one mirror that is adapted to move parallel to a plane of said at least one waveguide; and
a micromachine control element that positions said mirror in a desired position along an optical path. - View Dependent Claims (21)
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Specification