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Fabrication of advanced silicon-based MEMS devices

  • US 20040157426A1
  • Filed: 04/10/2003
  • Published: 08/12/2004
  • Est. Priority Date: 02/07/2003
  • Status: Abandoned Application
First Claim
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1. A method fabricating a micro-electro-mechanical (MEM) device and an electronic device on a common substrate comprising the steps of:

  • fabricating said electronic device comprising a plurality of electronic components on said common substrate;

    depositing a thermally stable interconnect layer on said electronic device;

    encapsulating the interconnected electronic device with a protective layer;

    forming a sacrificial layer over said protective layer;

    opening holes in the sacrificial layer and said protective layer to allow the connection of the MEM device to said electronic device;

    fabricating said MEM device by depositing and patterning at least one layer of amorphous silicon; and

    removing at least a portion of said sacrificial layer.

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