Magnetic field and acceleration sensor and method for simultaneously detecting magnetism and acceleration

• US 20040158439A1
• Filed: 07/02/2003
• Published: 08/12/2004
• Est. Priority Date: 12/10/2002
• Status: Abandoned Application

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Cho, Ji man, Kim, Kyoung Soo, An, Seung Do
• Application Number:
  US10/610,757
• Publication Number:
  US 20040158439A1
• Time in Patent Office: Days
• US Class Current: 702/190
• CPC Class Codes: G01D 21/02 Measuring two or more variables by means not covered by a single other subclass
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01R 33/02 Measuring direction or magnitude of magnetic fields or magnetic flux G01R33/20 takes precedence
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B

Abstract

A method and a magnetic field and acceleration sensor for simultaneously sensing magnetism and acceleration are disclosed, the method comprising the steps of applying a current to first and second movable structures which are movable in a first direction, spaced from fixedly arranged first and second sensing electrodes, respectively, and arranged in a plane perpendicular to the first direction, applying magnetic field and/or acceleration signals to the first and second movable structures, detecting capacitance changes from the first and second sensing electrodes, the capacitance changes being caused by the distance change between the first and second movable structures and the first and second sensing electrodes, respectively, outputting a magnetic field signal by subtracting a signal detected from the second sensing electrode from a signal detected from the first sensing electrode, and outputting an acceleration signal by adding the signals detected from the first and second sensing electrodes.

Claims

1. A method for simultaneously sensing a magnetic field and acceleration, comprising the steps of:

applying a current to first and second movable structures which are movable in a first direction, spaced from fixedly arranged first and second sensing electrodes, respectively, and arranged in a plane which is perpendicular to the first direction;

applying a magnetism and/or an acceleration to the first and second movable structures;

detecting capacitance changes from the first and second sensing electrodes, the capacitance changes being caused by the distance change between the first and second movable structures and the first and second sensing electrodes, respectively;

outputting a magnetic field signal by subtracting a signal detected from the second sensing electrode from a signal detected from the first sensing electrode; and

outputting an acceleration signal by adding the signals detected from the first and second sensing electrodes.

2. The method according to claim 1, wherein the first and second movable structures are movable in a Z-direction and arranged in an X-Y plane, current flows in a +Y-direction and a −

Y-direction in the first and second movable structures, respectively, and the acceleration and magnetic field are applied to the first and second movable structures in the Z-direction and in the X-direction, respectively.

3. A magnetic field and acceleration sensor capable of simultaneously detecting magnetism and acceleration comprising:

first and second movable structures which are movable in a direction and arranged in parallel with each other;

first and second sensing electrodes spaced from the first and second movable structures, respectively, by a predetermined distance and arranged fixedly;

an input electrode which is connected to one end of the first movable electrode and receives a predetermined frequency of current;

a ground electrode connected to one end of the second movable electrode; and

a common electrode connected to respective other ends of the first and second movable structures for transferring the current from the first movable electrode to the second movable electrode.

4. The magnetic field and acceleration sensor according to claim 3, wherein each of the first and second movable structures includes a supporting section fixedly arranged at a predetermined position, a spring having restoring force and connected to the supporting section, and a mass moving in a direction by a force and connected to the spring.

5. The magnetic field and acceleration sensor according to claim 3, wherein the certain force is an acceleration force which is applied in the same direction along which the first and second movable structures are movable and/or a Lorentz force which arises in a direction perpendicular to a current flowing direction and the direction along which the first and second movable structures are movable.

6. The magnetic field and acceleration sensor according to claim 3, wherein the sensor includes:

an adder for adding detected signals from the first and second sensing electrodes; and

a subtracter for subtracting the detected signal from the second sensing electrode from the detected signal from the first sensing electrode,

wherein an output signal of the adder is an acceleration sensing signal and an output signal of the subtracter is a magnetic field sensing signal.

7. The magnetic field and acceleration sensor according to claim 3, wherein the sensor includes:

an oscillator for applying current with a resonance frequency of the first and second movable structures to the input electrode;

a fixed phase amplifier for amplifying a predetermined frequency signal generated from the oscillator;

first and second amplifiers for amplifying signals detected from the first and second sensing electrodes;

first and second balancing circuits for adjusting the acceleration force of the signals output from the first and second amplifiers to have the same magnitude;

an adder for adding balanced signals output from the first and second balancing circuits, thereby producing an added signal;

a subtracter for subtracting the balanced signals output from the first and second balancing circuits, thereby producing a subtracted signal;

first and second mixers for eliminating oscillating frequency components from the added signal and the subtracted signal using oscillating frequency signals output from the fixed phase amplifier, thereby producing demodulated signals;

first and second low-pass filters for filtering the demodulated signals output from the first and second mixers to pass only low frequency signals having a frequency which is lower than a predetermined frequency;

a gain and offset adjusting unit for adjusting signals output from the first and second low-pass filters in gain and offset.

8. The magnetic field and acceleration sensor according to claim 7, wherein when the first and second movable structures are movable in a Z-direction, the current flows in ±

Y-directions, and output signals of the sensor are an X-direction magnetism signal and a Z-direction acceleration signal, respectively.

9. A five-axis magnetic field and acceleration sensor capable of simultaneously detecting magnetism and acceleration comprising:

a first magnetic field and acceleration sensor arranged in a such way that current flows in a Y-direction;

a second magnetic field and acceleration sensor arranged in a such way that current flows in an X-direction;

a first acceleration sensor arranged so as to detect an X-direction acceleration;

a second acceleration sensor arranged so as to detect a Y-direction acceleration;

a first signal processing unit for outputting a Z-direction acceleration signal and an X-direction magnetic field signal by adding and subtracting first and second detecting signals, respectively, output from the first magnetic field and acceleration sensor;

a second signal processing unit for outputting a Y-direction magnetic field signal by subtracting first and second detecting signals output from the second magnetic field and acceleration sensor;

a third signal processing unit for outputting an X-direction acceleration signal by processing a detected signal output from the first acceleration sensor; and

a fourth signal processing unit for outputting a Y-direction acceleration signal by processing a detected signal output from the second acceleration sensor.