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MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement

  • US 20040160232A1
  • Filed: 02/18/2003
  • Published: 08/19/2004
  • Est. Priority Date: 02/18/2003
  • Status: Active Grant
First Claim
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1. A Micro Electro-Mechanical System (MEMS) sensor, comprising:

  • a sensing element suspended for motion relative to a rotational axis, one or more stationary substrates spaced away from the sensing element; and

    a plurality of capacitors formed by the sensing element and the substrate, the capacitors being arranged substantially crosswise to the rotational axis of the sensing element.

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