MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement
First Claim
1. A Micro Electro-Mechanical System (MEMS) sensor, comprising:
- a sensing element suspended for motion relative to a rotational axis, one or more stationary substrates spaced away from the sensing element; and
a plurality of capacitors formed by the sensing element and the substrate, the capacitors being arranged substantially crosswise to the rotational axis of the sensing element.
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Accused Products
Abstract
A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a sensing element having first and second substantially planar and parallel spaced apart opposing surfaces and being suspended for pendulous motion about a hinge axis oriented along a minor axis of the sensing element; and one or more substrates each having a face spaced from one of the opposing surfaces of the sensing element, each of the substrates having pluralities of electrodes arranged substantially crosswise to the hinge axis of the sensing element symmetrically to a longitudinal axis of the sensing device and forming respective first and second capacitors with the moveable sensing element. Each of the one or more substrates optionally including a clearance relief for extending the rotational range of motion of the sensing element.
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Citations
27 Claims
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1. A Micro Electro-Mechanical System (MEMS) sensor, comprising:
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a sensing element suspended for motion relative to a rotational axis, one or more stationary substrates spaced away from the sensing element; and
a plurality of capacitors formed by the sensing element and the substrate, the capacitors being arranged substantially crosswise to the rotational axis of the sensing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A Micro Electro-Mechanical System (MEMS) acceleration sensing device, comprising:
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a sensing element suspended for motion about a hinge axis; and
a pair of substantially planar substrates spaced on opposite sides of the sensing element, each of the substrates having first and second electrodes arranged in elongated patterns oriented substantially crosswise to the hinge axis of the sensing element. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A Micro Electro-Mechanical System (MEMS) capacitive acceleration sensing device, comprising:
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a sensing element having first and second substantially planar and parallel spaced apart opposing surfaces and being suspended for pendulous motion about a hinge axis oriented along a shorter axis of the sensing element; and
one or more substantially planar substrates each having a face spaced away from one of the opposing surfaces of the sensing element, each of the substrates having first and second pluralities of electrodes arranged in elongated patterns oriented substantially crosswise to the hinge axis of the sensing element and forming respective first and second capacitors with sensing element. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27)
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Specification