Method for inspecting defect and apparatus for inspecting defect
First Claim
1. A method for inspecting defects, comprising the steps of:
- illuminating light to an inspection object formed circuit pattern on surface;
detecting an image signal of transmission light by shielding selectively diffraction light pattern generated from said circuit pattern in lights reflected from the surface of said inspection object; and
detecting the defects existing on the surface of the inspection object by processing the detected image signal;
wherein said selective shielding of said diffraction light pattern in said detecting step is performed by using a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
3 Assignments
0 Petitions
Accused Products
Abstract
The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
-
Citations
5 Claims
-
1. A method for inspecting defects, comprising the steps of:
-
illuminating light to an inspection object formed circuit pattern on surface;
detecting an image signal of transmission light by shielding selectively diffraction light pattern generated from said circuit pattern in lights reflected from the surface of said inspection object; and
detecting the defects existing on the surface of the inspection object by processing the detected image signal;
wherein said selective shielding of said diffraction light pattern in said detecting step is performed by using a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape. - View Dependent Claims (2)
-
-
3. An apparatus for inspecting defects, comprising:
-
an illumination optical system which illuminates light to an inspection object formed circuit pattern on surface;
a detection optical system which detects light transmitted a shielding unit in lights reflected from said inspection object and converts the detected light into an image signal;
the shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on the inspection object; and
a processing system which detects the defects by processing the image signal detected by said detection optical system. - View Dependent Claims (4, 5)
-
Specification