Space-variant subwavelength dielectric grating and applications thereof

• US 20040165269A1
• Filed: 01/23/2004
• Published: 08/26/2004
• Est. Priority Date: 09/13/2002
• Status: Active Grant

• Current Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD. (Technion-Israel Institute Of Technology)
• Original Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD. (Technion-Israel Institute Of Technology)
• Inventors: Kleiner, Vladimir, Hasman, Erez, Bomzon, Zeev
• Granted Patent: US 7,190,521 B2
• Time in Patent Office: Days
• US Class Current: 359/573
• CPC Class Codes: G02B 5/1809 with pitch less than or comparable to the wavelength

Abstract

An optical device includes a planar subwavelength grating (10) formed in a dielectric material and having a laterally varying, continuous grating vector. When used to modulate a beam of laterally uniform polarized electromagnetic radiation incident thereon, the device passes the incident beam with a predetermined, laterally varying transmissivity and/or retardation. When used to effect polarization state transformation, the device transforms a beam of electromagnetic radiation incident thereon into a transmitted beam having a predetermined, laterally varying polarization state. The device (214) can be used to provide radially polarized electromagnetic radiation for accelerating subatomic particles or for cutting a workpiece. The device (108) also can be used, in conjuction with a mechanism for measuring the lateral variation of the intensity of the transmitted beam, for measuring all four Stokes parameters that define the polarization state of the incident beam.

Claims

1. An optical device, for manipulating incident light of at most a certain maximum wavelength, comprising a substantially planar grating formed in a dielectric material and having a space-variant, continuous grating vector, at least a portion of said grating having a local period less than the maximum wavelength of the incident light.

2. The device of claim 1, wherein said grating is formed as a plurality of grooves in a planar substrate of said dielectric material.

3. The device of claim 1, wherein a magnitude of said grating vector varies laterally and continuously.

4. The device of claim 1, wherein a direction of said grating vector varies laterally and continuously.

5. The device of claim 1, wherein said grating vector is periodic.

6. The device of claim 5, wherein said grating vector is translationally periodic.

7. The device of claim 5, wherein said grating vector is rotationally periodic.

8. The device of claim 1, wherein said dielectric material is selected from the group consisting of gallium arsenide, zinc selenide, quartz and silica glass.

9. The device of claim 1, wherein said grating is operative to pass laterally uniform, polarized incident light with a predetermined, laterally varying transmissivity.

10. The device of claim 9, wherein said transmissivity varies periodically in one lateral direction.

11. The device of claim 1, wherein said grating is operative to pass laterally uniform, polarized incident light with a predetermined, laterally varying retardation.

12. The device of claim 11, wherein said retardation varies periodically in one lateral direction.

13. The device of claim 1, wherein said grating is operative to reflect laterally uniform polarized incident light with a predetermined, laterally varying reflectivity.

14. The device of claim 13, wherein said reflectivity varies periodically in one lateral direction.

15. The device of claim 1, wherein said grating is operative to reflect laterally uniform, polarized incident light with a predetermined, laterally varying retardation.

16. The device of claim 15, wherein said retardation varies periodically in one lateral direction.

17. The device of claim 1, wherein said grating is operative to transform light incident thereon into a transmitted beam having a predetermined, laterally varying polarization state.

18. The device of claim 17, wherein said transmitted beam has an azimuthal angle that varies linearly in one lateral direction.

19. The device of claim 17, wherein said transmitted beam is radially polarized.

20. The device of claim 19, wherein said radial polarization is in-phase.

21. The device of claim 19, wherein said radial polarization is anti-phase.

22. The device of claim 17, wherein said transmitted beam is azimuthally polarized.

23. The device of claim 22, wherein said azimuthal polarization is in-phase.

24. The device of claim 22, wherein said azimuthal polarization is anti-phase.

25. The device of claim 1, wherein said grating is operative to transform light incident thereon into a reflected beam having a predetermined, laterally varying polarization state.

26. The device of claim 25, wherein said reflected beam has an azimuthal angle that varies linearly in one lateral direction.

27. The device of claim 25, wherein said transmitted beam is radially polarized.

28. The device of claim 27, wherein said radial polarization is in-phase.

29. The device of claim 27, wherein said radial polarization is anti-phase.

30. The device of claim 25, wherein said reflected beam is azimuthally polarized.

31. The device of claim 30, wherein said azimuthal polarization is in-phase.

32. The device of claim 30, wherein said azimuthal polarization is anti-phase.

33. A particle accelerator comprising:

(a) a source of light;

(b) a first optical mechanism for forming said light into an annular beam;

(c) the device of claim 1, for imposing radial polarization on said annular beam;

(d) a second optical mechanism for focusing said radially polarized annular beam onto a focal region; and

(e) a particle source for directing a beam of the particles longitudinally through said focal region.

34. A method of cutting a workpiece, comprising the steps of:

(a) providing a beam of light;

(b) imposing radial polarization on said beam of light, using the device of claim 1;

and

(c) directing said radially polarized beam at the workpiece to cut the workpiece.

35. An apparatus for measuring a polarization state of light, comprising:

(a) the device of claim 1;

and

(b) a mechanism for measuring a lateral variation of an intensity of the light after the light has been manipulated by the device of claim 1.

36. A method of modulating laterally uniform, polarized light of at most a certain maximum wavelength, comprising the steps of:

(a) solving an equation

∇

×

{overscore (K)}(K₀,β

)=0

 

for a grating vector {overscore (K)} that is defined by a wavenumber K₀ and by a direction β

relative to a reference direction, the modulation depending on β

, {overscore (K)} being such that at least a portion of a grating fabricated in accordance with {overscore (K)} has a local period less than the maximum wavelength of the light;

(b) fabricating said grating in a dielectric material in accordance with said grating vector {overscore (K)}; and

(c) directing the light at said grating.

37. The method of claim 36, wherein said grating is fabricated as a plurality of grooves in a planar substrate of said dielectric material.

38. The method of claim 36, wherein said dielectric material is selected from the group consisting of gallium arsenide, zinc selenide, quartz and silica glass.

39. A method of imposing a laterally varying polarization state on light of at most a certain maximum wavelength, comprising the steps of:

(a) solving an equation

∇

×

{overscore (K)}(K₀,β

)=0

 

for a grating vector {overscore (K)} that is defined by a wavenumber K₀ and by a direction β

relative to a reference direction, the laterally varying polarization state being at least partially defined by β

, {overscore (K)} being such that at least a portion of a grating fabricated in accordance with {overscore (K)} has a local period less than the maximum wavelength of the light;

(b) fabricating said grating in a dielectric material in accordance with {overscore (K)}; and

(c) directing the light at said grating.

40. The method of claim 39, wherein said grating is fabricated as a plurality of grooves in a planar substrate of said dielectric material.

41. The method of claim 39, wherein said reference direction is a radial direction of a polar (r,θ

) coordinate system.

42. The method of claim 39, wherein said dielectric material is selected from the group consisting of gallium arsenide, zinc selenide, quartz and silica glass.

43. A method of measuring a polarization state of light of at most a certain maximum wavelength, comprising the steps of:

(a) providing a substantially planar grating having a transmission axis that varies in one lateral direction at least a portion of said grating having a local period less than the maximum wavelength of the light;

(b) directing the light at said grating;

(c) measuring an intensity of the light that has traversed said grating; and

(d) determining all four Stokes parameters of the light from said intensity.

44. The method of claim 43, further comprising the step of:

(e) causing at least a portion of the light to traverse a polarizer subsequent to traversing said grating.

45. The method of claim 43, wherein said transmission axis varies continuously in said one lateral direction.

46. The method of claim 45, wherein said transmission axis varies linearly in said one lateral direction.

47. The method of claim 43, wherein said grating is substantially planar, is formed as a plurality of grooves in a planar dielectric substrate, and has a space-variant, continuous grating vector, said transmission axis being a direction of said grating vector.

48. The method of claim 43, wherein said Stokes parameters are determined by performing respective integral transforms of said intensity in said lateral direction.

49. A method of measuring a polarization state of light of at most a certain maximum wavelength, comprising the steps of:

(a) providing a substantially planar grating having a reflection axis that varies in one lateral direction at least a portion of said grating having a local period less than the maximum wavelength of the light;

(b) directing the light at said grating;

(c) measuring an intensity of the light that is reflected from said grating; and

(d) determining all four Stokes parameters of the light from said intensity.

50. An optical device, for transforming an incident beam of light into a transformed beam of light, comprising a substantially planar grating formed in a dielectric material and having a space-variant continuous grating vector, such that the transformed beam is substantially free of propagating orders higher than zero order.

51. The device of claim 50, wherein said grating is formed as a plurality of grooves in a planar substrate of said dielectric material.

52. The device of claim 50, wherein a magnitude of said grating vector varies laterally and continuously.

53. The device of claim 50, wherein a direction of said grating vector varies laterally and continuously.

54. The device of claim 50, wherein said grating vector is periodic.

55. The device of claim 50, wherein said transformed beam is a transmitted beam, and wherein said grating is operative to pass laterally uniform, polarized incident light with a predetermined, laterally varying transmissivity.

56. The device of claim 50, wherein said transformed beam is a transmitted beam, and wherein said grating is operative to pass laterally uniform, polarized incident light with a predetermined, laterally varying retardation.

57. The device of claim 50, wherein said transformed beam is a reflected beam, and wherein said grating is operative to reflect laterally uniform, polarized incident light with a predetermined, laterally varying reflectivity.

58. The device of claim 50, wherein said transformed beam is a reflected beam and wherein said grating is operative to reflect laterally uniform, polarized incident light with a predetermined, laterally varying retardation.

59. The device of claim 50, wherein the transformed beam is a transmitted beam having a predetermined, laterally varying polarization state.

60. The device of claim 50, wherein the transformed beam is a reflected beam having a predetermnined, laterally varying polarization state.

61. A particle accelerator comprising:

(a) a source of light;

(b) a first optical mechanism for forming said light into an annular beam;

(c) the device of claim 50, for imposing radial polarization on said annular beam;

(d) a second optical mechanism for focusing said radially polarized annular beam onto a focal region; and

(e) a particle source for directing a beam of the particles longitudinally through said focal region.

62. A method of cutting a workpiece, comprising the steps of:

(a) providing a beam of light;

(b) imposing radial polarization on said beam of light, using the device of claim 50;

and

(c) directing said radially polarized beam at the workpiece to cut the workpiece.

63. An apparatus for measuring a polarization state of light, comprising:

(a) the device of claim 50;

and

(b) a mechanism for measuring a lateral variation of an intensity of the light after the light has been transformed by the device of claim 50.

64. A method of transforming an incident beam of laterally uniform, polarized light into a modulated transmitted beam, comprising the steps of:

(a) solving an equation

∇

×

{overscore (K)}(K₀,β

)=0

 

for a grating vector {overscore (K)} that is defined by a wavenumber K₀ and by a direction β

relative to a reference direction, the modulation depending on β

, {overscore (K)} being such that the transmitted beam is substantially free of propagating orders higher than zero order;

(b) fabricating said grating in a dielectric material in accordance with said grating vector {overscore (K)}; and

(c) directing the light at said grating.

65. The method of claim 64, wherein said grating is fabricated as a plurality of grooves in a planar substrate of said dielectric material.

66. A method of transforming an incident light beam into a transmitted beam upon which is imposed a laterally varying polarization state, comprising the steps of:

(a) solving an equation

∇

×

{overscore (K)}(K₀,β

)=0

 

for a grating vector {overscore (K)} that is defined by a wavenumber K₀ and by a direction β

relative to a reference direction, the laterally varying polarization state being at least partially defined by β

, {overscore (K)} being such that the transmitted beam is substantially free of propagating orders higher than zero order;

(b) fabricating said grating in a dielectric material in accordance with {overscore (K)}; and

(c) directing the light at said grating.

67. The method of claim 66, wherein said grating is fabricated as a plurality of grooves in a planar substrate of said dielectric material.

68. A method of measuring a polarization state of an incident light beam, comprising the steps of:

(a) providing a substantially planar grating having a transmission axis that varies in one lateral direction, said grating being operative to transform the incident beam into a transmitted beam that is substantially free of propagating orders higher than zero order;

(b) directing the light at said grating;

(c) measuring an intensity of the transmitted beam; and

(d) determining all four Stokes parameters of the light from said intensity.

69. A method of measuring a polarization state of an incident light beam, comprising the steps of:

(a) providing a substantially planar grating having a reflection axis that varies in one lateral direction, said grating being operative to transform the incident beam into a reflected beam that is substantially free of propagating orders higher than zero order;

(b) directing the light at said grating;

(c) measuring an intensity of the reflected beam; and

(d) determining all four Stokes parameters of the light from said intensity.