×

Barrier-forming film and manufacturing method thereof

  • US 20040166239A1
  • Filed: 02/24/2004
  • Published: 08/26/2004
  • Est. Priority Date: 10/13/2000
  • Status: Active Grant
First Claim
Patent Images

1. A manufacturing method of a barrier-forming film comprising the steps of providing a vapor-deposited inorganic oxides film on a side of a substrate film, and applying an annealing treatment to the substrate film having said vapor-deposited inorganic film.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×