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METHOD OF FABRICATING SEMICONDUCTOR DEVICE

  • US 20040166656A1
  • Filed: 02/25/2004
  • Published: 08/26/2004
  • Est. Priority Date: 08/28/1997
  • Status: Active Grant
First Claim
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1. A method of fabricating a semiconductor device comprising the steps of:

  • (a) forming a trench in a semiconductor substrate having a first semiconductor region of a first conductivity type, from a major surface of the semiconductor substrate in a depth direction thereof;

    (b) forming a gate insulating film including a thermal oxide film and a deposition film over the internal surface of the trench;

    (c) forming a gate electrode over the gate insulating film in the trench; and

    (d) introducing, after said step (c), impurities into the semiconductor substrate to form a second semiconductor region of a second conductivity type; and

    (e) introducing, after said step (c), impurities into the semiconductor substrate to form a third semiconductor region of the first conductivity type, the third semiconductor region being formed at a place deeper than the first semiconductor region, the second semiconductor region being formed between the third semiconductor region and the first semiconductor region in the depth direction.

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