System and method for on-the-fly eccentricity recognition
First Claim
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1. A method of substrate eccentricity detection comprising:
- determining at least three positions on a perimeter of a first substrate;
estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions; and
determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first substrate rests.
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Abstract
A method of substrate eccentricity detection includes includes determining at least three positions on a perimeter of a first substrate, grouping the at least three perimeter positions to define one or more circles, estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions, and determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first substrate rests.
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Citations
39 Claims
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1. A method of substrate eccentricity detection comprising:
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determining at least three positions on a perimeter of a first substrate;
estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions; and
determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first substrate rests. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for determining the eccentricity of a first substrate comprising:
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capturing a position of a mechanism transporting the first substrate upon detection of each of at least three points on a perimeter of the first substrate;
compensating the captured positions for detection delays;
converting the transport mechanism positions to positions on the perimeter of the first substrate;
estimating a location of a center of the substrate as the location of a center of a predetermined circle approximated from the perimeter positions; and
determining an eccentricity vector as a difference between the estimated location and a reference position on the substrate transport mechanism. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A method for determining the eccentricity of a substrate comprising:
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displacing the substrate through a field of view of one or more sensors to detect at least three points on a perimeter of the substrate;
capturing a position of a mechanism displacing the substrate upon detection of each of the at least three points;
compensating the captured positions for detection delays;
converting the transport mechanism positions to positions on the perimeter of the substrate;
grouping the perimeter positions into trios, each trio defining a circle;
estimating a location of a center of the substrate as the location of a center of a predetermined circle approximated from the perimeter positions; and
determining an eccentricity vector as a difference between the estimated location and a reference position on the substrate transport mechanism. - View Dependent Claims (23)
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24. A system for substrate eccentricity detection comprising:
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a substrate transport mechanism for transporting a first substrate along a path;
at least one sensor for sensing points on a perimeter of the first substrate; and
a controller connected to the substrate transport mechanism and to the at least one sensor, operable to;
determine at least three positions on the perimeter of the first substrate determined when the at least one sensor detects a perimeter of the first substrate;
estimate a location of a center of the first substrate as the location of a center of a theoretical circle which is approximated from a set of the at least three perimeter positions; and
determine an eccentricity vector as a difference between the estimated location and a reference position on the substrate transport mechanism. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A system for substrate eccentricity detection comprising:
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a substrate transport mechanism for transporting a substrate along a path;
at least one sensor having a centerline positioned eccentric to the path for sensing points on a perimeter of the substrate; and
a controller connected to the substrate transport mechanism and to the at least one sensor, operable to;
determine at least three positions on a perimeter of the substrate when the at least one sensor detects the perimeter of the first substrate;
estimate a location of a center of the substrate as the location of a center of a theoretical circle with a radius equal to a nominal radius which is approximated by a set of the at least three perimeter positions; and
determine an eccentricity vector as a difference between the estimated location and a reference position on the substrate transport mechanism.
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Specification