Method of orientating a template with respect to a substrate in response to a force exerted on the template
First Claim
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1. A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
- rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template.
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Abstract
The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.
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Citations
23 Claims
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1. A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to contact with a material compressed between said template and said substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
rotating said template about a first and a second axis, with first axis independent from said second axis, to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template. - View Dependent Claims (18, 19, 20, 21, 22, 23)
Specification