Active matrix substrate, method of manufacturing the same, and image sensor incorporating the same
First Claim
1. An active matrix substrate, comprising:
- a pixel electrode provided for each pixel constituted by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element located near a point where the scanning line crosses the signal line, so as to be connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line, wherein the signal line, the storage capacitor electrode, and the storage capacitor common wire are fabricated from a single electrode layer through patterning thereof.
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Abstract
A signal line and a pixel capacitor wire that doubles as a pixel capacitor electrode are fabricated parallel to each other from the same electrode layer through patterning thereof. Therefore, no additional steps are required to form the pixel capacitor wire. In such an arrangement, the pixel capacitor wire and the signal line are disposed parallel to each other; therefore, delays of signal transmission in the signal line and crosstalk between pixels are prevented from occurring. The active matrix substrate incorporating this arrangement is suitably used in liquid crystal display devices, image sensors, and the like. Similar advantages are available with an arrangement in which the signal line and the pixel capacitor wire are disposed parallel to each other, and the storage capacitor electrode, which will constitute a storage capacitor with the pixel electrode therebetween, and the scanning line are fabricated from the same electrode layer through patterning thereof.
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Citations
41 Claims
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1. An active matrix substrate, comprising:
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a pixel electrode provided for each pixel constituted by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element located near a point where the scanning line crosses the signal line, so as to be connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line, wherein the signal line, the storage capacitor electrode, and the storage capacitor common wire are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (3, 4, 5, 6, 7, 8)
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2. An active matrix substrate, comprising:
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a pixel electrode provided in each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the signal line and the storage capacitor electrode are fabricated from a single electrode layer through patterning thereof.
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9. An active matrix substrate, comprising:
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a pixel electrode provided in each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the storage capacitor is formed between the pixel electrode and the storage capacitor electrode, and the scanning line and the storage capacitor electrode are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (10, 11, 12, 13, 14, 15, 28)
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16. An active matrix substrate, comprising:
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a pixel electrode provided in each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the scanning line and the pixel electrode are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (17, 18, 19, 20, 29)
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21. An active matrix substrate, comprising:
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a first pixel electrode provided for each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the first pixel electrode;
a second pixel electrode connected to the first pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the second pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the scanning line and the second pixel electrode are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (22, 23, 24, 25, 26, 27, 30)
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31. A method of manufacturing an active matrix substrate including:
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a pixel electrode provided for each pixel constituted by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element located near a point where the scanning line crosses the signal line, so as to be connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line, wherein the signal line, the storage capacitor electrode, and the storage capacitor common wire are fabricated from a single electrode layer through patterning thereof, said method comprising the step of fabricating the signal line, the storage capacitor electrode, and the storage capacitor common wire from a single electrode layer through patterning thereof.
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32. A method of manufacturing an active matrix substrate including:
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a pixel electrode provided in each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, said method comprising the steps of;
depositing an electrode layer on the active matrix substrate and patterning the electrode layer so as to fabricate the scanning line and the pixel electrode;
depositing a gate insulation film;
fabricating the signal line, the switching element, the storage capacitor electrode, and the storage capacitor common wire, and subsequently depositing a protection film; and
concurrently patterning the gate insulation film and the protection film so as to form an aperture section in the pixel electrode. - View Dependent Claims (33)
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34. An image sensor, comprising:
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an active matrix substrate;
a conversion section for converting incident magnetoelectric radiation to electric charges; and
bias voltage application means for causing a storage capacitor to store the electric charges, wherein the active matrix substrate includes;
a pixel electrode provided for each pixel constituted by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element located near a point where the scanning line crosses the signal line, so as to be connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line, wherein the signal line, the storage capacitor electrode, and the storage capacitor common wire are fabricated from a single electrode layer through patterning thereof.
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35. An image sensor, comprising:
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an active matrix substrate;
a conversion section for converting incident magnetoelectric radiation to electric charges; and
bias voltage application means for causing a storage capacitor to store the electric charges, wherein the active matrix substrate includes;
a pixel electrode provided in each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the signal line and the storage capacitor electrode are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (36, 37)
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38. An image sensor, comprising:
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an active matrix substrate;
a conversion section for converting incident magnetoelectric radiation to electric charges; and
bias voltage application means for causing a storage capacitor to store the electric charges, wherein the active matrix substrate includes;
a pixel electrode provided in each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the scanning line and the pixel electrode are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (39)
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40. An image sensor, comprising:
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an active matrix substrate;
a conversion section for converting incident magnetoelectric radiation to electric charges; and
bias voltage application means for causing a storage capacitor to store the electric charges, wherein the active matrix substrate includes;
a first pixel electrode provided for each pixel area bounded by a scanning line and a signal line that are disposed in a matrix as a whole;
a switching element connected to the scanning line, the signal line, and the first pixel electrode;
a second pixel electrode connected to the first pixel electrode;
a storage capacitor electrode for constituting a storage capacitor with the second pixel electrode therebetween; and
a storage capacitor common wire disposed parallel to the signal line so as to be connected to the storage capacitor electrode, wherein the scanning line and the second pixel electrode are fabricated from a single electrode layer through patterning thereof. - View Dependent Claims (41)
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Specification