Electrically isolated support for overlying MEM structure
First Claim
1. A MEM apparatus comprising:
- a substrate;
a first structure supported on said substrate;
an electrostatic component disposed between said substrate and said first structure and extending across an area of said substrate; and
at least one support structure disposed within said area of said substrate for supporting said first structure.
1 Assignment
0 Petitions
Accused Products
Abstract
MEM devices are fabricated with integral dust covers, cover support posts and particle filters for reduced problems relating to particle contamination. In one embodiment, a MEM device (10) includes an electrostatic actuator (12) that drives a movable frame (14), a displacement multiplier (16) for multiplying or amplifying the displacement of the movable frame (14), and a displacement output element (18) for outputting the amplified displacement. The actuator (12) is substantially encased within a housing formed by a cover (36) and related support components disposed between the cover (36) and the substrate (38). Electrically isolated support posts may be provided in connection with actuator electrodes to prevent contact between the cover and the underlying electrodes. Such a support post may also incorporate an electric filter element for filtering undesired components from a drive signal. Particle filters may be provided in connection with etch release holes or other openings in order to further protect against particle contamination.
52 Citations
29 Claims
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1. A MEM apparatus comprising:
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a substrate;
a first structure supported on said substrate;
an electrostatic component disposed between said substrate and said first structure and extending across an area of said substrate; and
at least one support structure disposed within said area of said substrate for supporting said first structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A MEM apparatus comprising:
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a substrate;
a first structure supported on said substrate;
a movable component disposed between said substrate and said first structure and extending across an area of said substrate; and
at least one support structure disposed within said area of said substrate for supporting said first structure. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A MEM apparatus, comprising:
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a movable optical component;
an actuator mechanism for effecting movement of said optical component;
a cover extending over at least a portion of said actuator mechanism, said cover further extending across an area; and
at least one support structure, disposed within said area, for supporting said cover. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A MEM apparatus, comprising:
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a substrate; and
a micromachined structure formed on said substrate including;
an electrical lead supported on said substrate; and
filter structure, supported on said substrate, for filtering an undesired electrical component from said lead. - View Dependent Claims (23)
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24. A method for use in constructing a MEM device, comprising the steps of:
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first establishing an active component on a substrate, said active component comprising one of movable component and an electrostatic component, said active component extending across an area of said substrate;
second establishing an overlying structure extending over at least a portion of said active component; and
third establishing at least one support structure within said area for supporting said overlying structure. - View Dependent Claims (25, 26, 27, 28, 29)
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Specification