Fire polished showerhead electrode

• US 20040173313A1
• Filed: 03/03/2003
• Published: 09/09/2004
• Est. Priority Date: 03/03/2003
• Status: Abandoned Application

• Current Assignee: MEC Tech Incorporated
• Original Assignee: MEC Tech Incorporated
• Inventors: Beach, Bradley
• Application Number:
  US10/378,211
• Publication Number:
  US 20040173313A1
• Time in Patent Office: Days
• US Class Current: 156/345.33
• CPC Class Codes: C03B 29/02 in a discontinuous way
• CPC Class Codes: C03C 23/007 by thermal treatment
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32532 Electrodes
• CPC Class Codes: Y02P 40/57 Improving the yield, e-g- reduction of reject rates

Abstract

A method for processing a quartz showerhead-type electrode having a first surface, a second surface, and a plurality of passages extending through the electrode, from the first surface to the second surface, each passage defined by a sidewall, which comprises fire polishing the sidewalls. Additionally, the sidewalls have a central portion and opposing transition areas adjacent to the first and second surfaces, and the method comprises fire polishing the transition areas. Further, the electrode may be textured after fire polishing.

Claims

1. A method for processing a quartz showerhead-type electrode comprising the steps of:

providing a quartz plate having a first surface, a second surface, and a passage extending through the electrode, from the first surface to the second surface, the passage defined by a sidewall; and

fire polishing the sidewall.

2. The method of claim 1, further comprising the step of abrasively texturing one of the surfaces of the electrode.

3. The method of claim 1, further comprising the steps of:

filling the passage with wax; and

abrasively texturing one of the surfaces of the electrode.

4. The method of claim 1, wherein the quartz plate is provided with a plurality of passages extending through the electrode, from the first surface to the second surface, each passage defined by a sidewall, further comprising fire polishing the sidewalls.

5. The method of claim 4, further comprising the step of abrasively texturing one of the surfaces of the electrode.

6. The method of claim 4, further comprising the steps of:

filling the passages with wax; and

abrasively texturing one of the surfaces of the electrode.

7. A method for manufacturing a quartz showerhead-type electrode, comprising the steps of:

providing a quartz plate having a first surface and a second surface;

creating a passage extending through the plate, from the first surface to the second surface, the passage defined by a sidewall; and

fire polishing the sidewall.

8. The method of claim 7, further comprising the step of abrasively texturing one of the surfaces of the plate.

9. The method of claim 7, further comprising the steps of:

filling the passage with wax; and

abrasively texturing one of the surfaces of the plate.

10. The method of claim 7, further comprising the steps of:

creating a plurality of passages extending through the plate, from the first surface to the second surface, each passage defined by a sidewall; and

fire polishing the sidewalls.

11. The method of claim 10, further comprising the step of abrasively texturing one of the surfaces of the plate.

12. The method of claim 10, further comprising the steps of:

filling the passages with wax; and

abrasively texturing one of the surfaces of the plate.

13. A quartz showerhead-type electrode, comprising:

a quartz plate, having a first surface and a second surface; and

a passage extending through the plate, from the first surface to the second surface, the passage defined by a sidewall;

wherein the sidewall is fire polished.

14. The electrode of claim 13, wherein one of the surfaces of the electrode is textured.

15. The electrode of claim 13, further comprising:

a plurality of passages extending through the plate, from the first surface to the second surface, each passage defined by a sidewall;

wherein the sidewalls are fire polished.

16. The electrode of claim 15, wherein one of the surfaces of the electrode is textured.

17. A method for processing a quartz showerhead-type electrode comprising the steps of:

providing a quartz plate having a first surface, a second surface, and a passage extending through the electrode, from the first surface to the second surface, the passage defined by a sidewall having a central portion and opposing transition areas adjacent to the first and second surfaces; and

fire polishing the transition areas.

18. The method of claim 17, further comprising the step of abrasively texturing one of the surfaces of the electrode.

19. The method of claim 17, further comprising the steps of:

filling the passage with wax; and

abrasively texturing one of the surfaces of the electrode.

20. The method of claim 17, wherein the quartz plate is provided with a plurality of passages extending through the electrode, from the first surface to the second surface, each passage defined by a sidewall having a central portion and opposing transition areas adjacent to the first and second surfaces, further comprising fire polishing the transition areas.

21. The method of claim 20, further comprising the step of abrasively texturing one of the surfaces of the electrode.

22. The method of claim 20, further comprising the steps of:

filling the passages with wax; and

abrasively texturing one of the surfaces of the electrode.

23. A method for manufacturing a quartz showerhead-type electrode, comprising the steps of:

providing a quartz plate having a first surface and a second surface;

creating a passage extending through the plate, from the first surface to the second surface, the passage defined by a sidewall having a central portion and opposing transition areas adjacent to the first and second surfaces; and

fire polishing the transition areas.

24. The method of claim 23, further comprising the step of abrasively texturing one of the surfaces of the plate.

25. The method of claim 23, further comprising the steps of:

filling the passage with wax; and

abrasively texturing one of the surfaces of the plate.

26. The method of claim 23, further comprising the steps of:

creating a plurality of passages extending through the plate, from the first surface to the second surface, each passage defined by a sidewall having a central portion and opposing transition areas adjacent to the first and second surfaces; and

fire polishing the transition areas.

27. The method of claim 26, further comprising the step of abrasively texturing one of the surfaces of the plate.

28. The method of claim 26, further comprising the steps of:

filling the passages with wax; and

abrasively texturing one of the surfaces of the plate.

29. A quartz showerhead-type electrode, comprising:

a quartz plate, having a first surface and a second surface; and

a passage extending through the plate, from the first surface to the second surface, the passage defined by a sidewall having a central portion and opposing transition areas adjacent to the first and second surfaces;

wherein the transition areas are fire polished.

30. The electrode of claim 29, wherein the transition areas are substantially smooth and curved.

31. The electrode of claim 29, wherein one of the surfaces of the electrode is textured.

32. The electrode of claim 29, further comprising a plurality of passages extending through the plate, from the first surface to the second surface, each passage defined by a sidewall having a central portion and opposing transition areas adjacent to the first and second surfaces;

wherein the transition areas are fire polished.

33. The electrode of claim 32, wherein the transition areas are substantially smooth and curved.

34. The electrode of claim 32, wherein one of the surfaces of the electrode is textured.