Apparatus and method for cleaning a bell jar in a barrel epitaxial reactor

• US 20040178176A1
• Filed: 03/30/2004
• Published: 09/16/2004
• Est. Priority Date: 09/05/2000
• Status: Abandoned Application

• Current Assignee: Frank J. Dunn
• Original Assignee: Frank J. Dunn
• Inventors: Dunn, Frank J.
• Application Number:
  US10/812,606
• Publication Number:
  US 20040178176A1
• Time in Patent Office: Days
• US Class Current: 216/58
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: C30B 25/10 Heating of the reaction chamber or the substrate

Abstract

An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower. The controller module code for controlling the blower controller module is installed within a control module connected to the epitaxial deposition device for controlling the operation of the epitaxial deposition device

Claims

1. A method of cleaning an epitaxial deposition apparatus comprising:

increasing the surface temperature of a bell jar in said epitaxial deposition apparatus to a first predetermined temperature range;

measuring the air flow temperature within an exhaust plenum of said epitaxial deposition apparatus;

introducing a reactive gas capable of reacting at said first predetermined temperature range with material deposited on the inside surface of said bell jar and forming gaseous by-products; and

maintaining the temperature of said bell jar surface at said first predetermined temperature range for a time sufficient to allow said material deposited on said inside surface of said bell jar to be removed.

2. The method as claimed in claim 1 wherein said method further includes removing said gaseous by-products from said bell jar.

3. The method as claimed in claim 2 wherein said removing step is performed by purging said bell jar with a purging gas.

4. The method as claimed in claim 1 wherein said method further includes measuring the transparency of said bell jar wall.

5. The method as claimed in claim 1 wherein said method further includes purging said reactive gas from said bell jar.

6. The method as claimed in claim 1 wherein said method further includes decreasing the temperature of said bell jar surface to a second predetermined temperature after removal of said deposited material from the inside surface of said bell jar.

7. The method as claimed in claim 1 wherein said step of increasing said temperature further includes reducing the speed of an air-circulating blower of said epitaxial deposition apparatus wherein the air flow caused by said blower flows past said bell jar and is used to control the temperature of said bell jar surface.

8. The method as claimed in claim 1 wherein said step of maintaining the temperature of said bell jar surface at said first predetermined temperature range further includes measuring the surface temperature of said bell jar surface.