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Multi-stage type processing apparatus

  • US 20040179173A1
  • Filed: 02/16/2004
  • Published: 09/16/2004
  • Est. Priority Date: 02/20/2003
  • Status: Active Grant
First Claim
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1. A multi-stage type processing apparatus comprising:

  • a plurality of processing units which are provided apart from each other in the vertical direction, each unit having a cup surrounding a substrate and a chuck for retaining and rotating a substrate, wherein the cups and the chucks are separated, all the cups being supported by an elevator member so as to be elevated and lowered unitarily and all the chucks being supported by a fixing member, and rotation drive force is distributed from a drive shaft which is positioned in the vertical direction.

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