Container for a mask, method of transferring lithographic masks therein and method of scanning a mask in a container

• US 20040180270A1
• Filed: 12/24/2003
• Published: 09/16/2004
• Est. Priority Date: 12/27/2002
• Status: Abandoned Application

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Heerens, Gert-Jan
• Application Number:
  US10/744,095
• Publication Number:
  US 20040180270A1
• Time in Patent Office: Days
• US Class Current: 430/5
• CPC Class Codes: G03F 1/66 Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70741 Handling masks outside exposure position, e.g. reticle libraries
• CPC Class Codes: G03F 7/70808 Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
• CPC Class Codes: G03F 7/70983 Optical system protection, e.g. pellicles or removable covers for protection of mask

Abstract

A container for enclosing a mask for a lithographic device is disclosed. The container is at least partially translucent for radiation of at least a predetermined wavelength and is formed in such a way that an image can be obtained from outside the container using light of that wavelength.

Claims

1. A mask container configured to enclose a mask, wherein the container is at least partially translucent for radiation of at least a predetermined wavelength, the container being formed in such a way that an image can be obtained of the mask from outside the container using light of said wavelength.

2. A mask container according to claim 1, wherein the translucent part of the container comprises at least one of glass and plexiglass.

3. A mask container according to claim 1, wherein the container comprises a bottom part and a top part, the bottom and top parts each comprising connecting members, such that the connecting members of the bottom part can connect to the connecting members of the top part.

4. A mask container according to claim 3, wherein at least one of the top part and the bottom part of the container is at least partially translucent to radiation to allow scanning of at least one side of the mask.

5. A mask container according to claim 3, wherein the connecting members of at least one of the bottom part and the top part are at least partially porous to allow a pressure difference between the outside and the inside of the container to be neutralized.

6. A mask container according to claim 1, wherein the container comprises support devices to support the mask.

7. A mask container according to claim 6, wherein the support devices are formed as legs extending from the container to the mask.

8. A mask container according to claim 6, wherein the support devices are arranged to support the mask in different directions, thereby clamping the mask.

9. A mask container according to claim 1, wherein the properties of the translucent parts of the container are locally adapted in correspondence with a patterning structure on the mask.

10. A mask container according to claim 9, wherein the translucent parts of the container comprise a lens.

11. A mask container according to claim 1, wherein the container fits in a storage box or is a storage box.

12. A mask container comprising:

a top portion;

a bottom portion connected to the top portion; and

a support structure configured to support a mask inside of the container,

wherein at least one of the top portion and the bottom portion is at least partially translucent for radiation of a least a predetermined wavelength such that an image can be obtained of the mask from outside of the container using light of the predetermined wavelength.

13. A method for transferring a mask from a storage box to an enclosed protective environment for handling, processing, or using said mask, said storage box comprising a first part defining a first opening and an openable cover part that covers said opening, said enclosed protective environment comprising a second part defining a second opening and an openable wall part covering said second opening, said method comprising:

providing said storage box onto said openable wall part of said enclosed protective environment such that said openable cover part faces said openable wall part, said protective environment being adapted to either be filled with an inert gas or be evacuated;

opening said openable cover part of said storage box and said openable wall part of said protective environment, wherein said first part of said storage box engages said second part of said protective environment; and

transferring said mask from an inside space of said storage box to a space within said protective environment.

14. A method according to claim 13, further comprising:

removing a top part and a bottom part of a container when said mask is transferred from said inside space of said storage box to said space within said protective environment.

15. A method for transferring a mask to a storage box from an enclosed protective environment for handling, processing, or using said mask, said storage box comprising a first part defining a first opening and an openable cover part that covers said opening, said enclosed protective environment comprising a second part defining a second opening and an openable wall part covering said second opening, said method comprising:

providing said storage box onto said openable wall part of said enclosed protective environment such that said openable cover part faces said openable wall part, said protective environment being adapted to either be filled with an inert gas or be evacuated;

opening said openable cover part of said storage box and said openable wall part of said protective environment, wherein said first part of said storage box engages said second part of said protective environment; and

transferring said mask to an inside space of said storage box from a space within said protective environment.

16. A method according to claim 15, further comprising:

removing a top part and a bottom part of the container when said mask is transferred to said inside space of said storage box from said space within said protective environment.

17. A method of detecting contamination of a mask, comprising:

scanning the mask with a scanner assembly, wherein the mask is enclosed by a mask container.

18. A lithographic projection apparatus comprising:

a storage box for a mask, said storage box comprising a first part defining a first opening and an openable cover that covers said first opening; and

an enclosed protective environment in which said mask is handled, processed, or used, said enclosed protective environment comprising a second part defining a second opening and an openable wall part covering said second opening, said enclosed protective environment being adapted to either be filled with an inert gas or be evacuated,

wherein said first part of said storage box is configured to engage said second part of said enclosed protective environment, and wherein said openable cover and said openable wall part are movable into said enclosed protective environment to enable said mask to be transferred from said storage box to said enclosed protective environment.

19. A lithographic projection apparatus according to claim 18, further comprising a container for said mask, wherein said container encloses said mask when said mask is contained within said storage box and said container is at least partially translucent for radiation of a least a predetermined wavelength such that an image can be obtained of the mask from outside of the container using light of the predetermined wavelength.