Method of identifying wafer cutting positions of different size partial wafers
First Claim
Patent Images
1. A method of determining the cut position for a partial wafer comprising the steps of:
- getting wafermap data;
displaying wafermap data, displaying cutter coordinates; and
moving displayed cutter coordinates relative to the wafermap and generating bin details for resultant partial wafer that results from cuts at displayed cutter position.
1 Assignment
0 Petitions
Accused Products
Abstract
A tool and method is described to decide partial wafer sizes to process multiple random sizes of wafers in pick and place equipment for wafermap operation. The tool identifies the wafer and gets wafermap data. The position of one or more cutters is displayed. The position of the cutters relative to the wafer is displayed. The tool generates and displaying the results of the type of dies in each partial that would result from a cut according to said displayed position of the cutters.
-
Citations
10 Claims
-
1. A method of determining the cut position for a partial wafer comprising the steps of:
-
getting wafermap data;
displaying wafermap data, displaying cutter coordinates; and
moving displayed cutter coordinates relative to the wafermap and generating bin details for resultant partial wafer that results from cuts at displayed cutter position. - View Dependent Claims (2, 3)
-
-
4. A method for deciding and providing a partial wafer size for production demands comprises the steps of:
-
getting wafermap data, displaying the coordinates of the one or more cutters relative to the wafer to be cut, and moving the displayed coordinates of said one or more cutters relative to the wafer and generating bin details of resultant partial wafer. - View Dependent Claims (5)
-
-
6. A method for deciding and providing a partial wafer size for production demands comprising the steps of:
-
displaying the coordinates of a pair of orthogonal oriented wafer cutters relative to a wafer or partial wafer, getting wafermap data of good dies moving the displayed position of the cutters relative to the wafer; and
generating and displaying the results of the type of dies in each partial wafer that would result from the cut according to said wafermap data.
-
-
7. A method for deciding and providing a partial wafer size for production demands comprising the steps of:
-
identifying the wafer;
getting the wafermap data;
automatically querying the user for the number of good dies wanted and the type of partial wafer selected; and
automatically displaying the cut position coordinates for one or more cutters.
-
-
8. A tool for deciding and providing a partial wafer size for production comprising:
-
means for getting wafer identification;
means for getting wafermap data;
means for determining the position of the one or more cutters; and
means for moving the displayed position of the cutters relative to the wafer and generating and displaying the results of the type of dies in each partial that would result from a cut according to said displayed position of the cutters. - View Dependent Claims (9)
-
-
10. A tool for deciding and providing a partial wafer size for production comprising:
-
means for identifying the wafer;
means for getting the wafermap data;
means for automatically querying the user for the number of good dies wanted and the type of partial wafer selected; and
said tool automatically deciding and displaying the cut position or one or more cutters based on the number of good dies wanted and the type of partial wafer selected.
-
Specification