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Process and system for eliminating gas bubbles during electrochemical processing

  • US 20040182712A1
  • Filed: 10/24/2003
  • Published: 09/23/2004
  • Est. Priority Date: 03/20/2003
  • Status: Active Grant
First Claim
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1. A method for preventing gas bubble formation on a workpiece surface using a process solution as the surface is brought in contact with the process solution for an electrochemical process, the method comprising:

  • bringing the workpiece surface in proximity of surface of the process solution;

    directing a process solution flow towards central region of the workpiece surface for a predetermined time; and

    contacting the central region of the workpiece surface with the process solution flow for the predetermined time to prevent bubble formation.

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