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Method and apparatus for providing lens aberration compensation by illumination source optimization

  • US 20040184030A1
  • Filed: 11/12/2003
  • Published: 09/23/2004
  • Est. Priority Date: 11/12/2002
  • Status: Active Grant
First Claim
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1. A method for compensating for lens aberrations, said method comprising the steps of:

  • (a) defining a cost metric which quantifies an imaging performance of an imaging system, said cost metric reflecting the effects of lens aberrations on said imaging performance;

    (b) defining a source illumination profile;

    (c) evaluating said cost metric based on said source illumination profile;

    (d) modifying said source illumination profile, and re-evaluating said cost metric based on said modified source illumination profile; and

    (e) repeating step (d) until said cost metric is minimized.

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