Method of continuous processing of thin-film batteries and like devices

• US 20040185667A1
• Filed: 03/29/2004
• Published: 09/23/2004
• Est. Priority Date: 03/24/2000
• Status: Active Grant

• Current Assignee: Cymbet Corporation
• Original Assignee: Cymbet Corporation
• Inventors: Jenson, Mark Lynn
• Granted Patent: US 6,924,164 B2
• Time in Patent Office: Days
• US Class Current: 438/689
• CPC Class Codes: A61N 1/3787 from an external energy source
• CPC Class Codes: C23C 14/0031 Bombardment of substrates by reactive ion beams
• CPC Class Codes: C23C 14/0676 Oxynitrides
• CPC Class Codes: C23C 14/08 Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 16/047 using irradiation by energy or particles
• CPC Class Codes: G02F 1/13306 Circuit arrangements or driving methods for the control of single liquid crystal cells G02F1/132, G02F1/133382 take precedence
• CPC Class Codes: G02F 1/13324 Circuits comprising solar cells
• CPC Class Codes: H01G 11/08 Structural combinations, e.g. assembly or connection, of hybrid or EDL capacitors with other electric components, at least one hybrid or EDL capacitor being the main component
• CPC Class Codes: H01G 11/26 characterised by their structure, e.g. multi-layered, porosity or surface features
• CPC Class Codes: H01G 11/56 Solid electrolytes, e.g. gels; Additives therein
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/49109 outside the semiconductor or solid-state body
• CPC Class Codes: H01L 23/58 Structural electrical arrangements for semiconductor devices not otherwise provided for , e.g. in combination with batteries H01L23/49593, H01L23/49596 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/10253 Silicon [Si]
• CPC Class Codes: H01L 2924/12044 OLED
• CPC Class Codes: H01L 31/073 comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
• CPC Class Codes: H01L 31/1828 : the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
• CPC Class Codes: H01M 10/0436 : Small-sized flat cells or batteries for portable equipment
• CPC Class Codes: H01M 10/0472 : Vertically superposed cells with vertically disposed plates
• CPC Class Codes: H01M 10/052 : Li-accumulators
• CPC Class Codes: H01M 10/0525 : Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
• CPC Class Codes: H01M 10/0562 : Solid materials
• CPC Class Codes: H01M 10/058 : Construction or manufacture
• CPC Class Codes: H01M 10/0585 : of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
• CPC Class Codes: H01M 10/42 : Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells H01M10/60 takes precedence
• CPC Class Codes: H01M 10/425 : Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing printed circuits H05K1/00
• CPC Class Codes: H01M 10/4257 : Smart batteries, e.g. electronic circuits inside the housing of the cells or batteries
• CPC Class Codes: H01M 10/4264 : with capacitors
• CPC Class Codes: H01M 10/44 : Methods for charging or discharging circuits for charging H02J7/00
• CPC Class Codes: H01M 10/46 : Accumulators structurally combined with charging apparatus circuits for charging H02J7/00
• CPC Class Codes: H01M 10/465 : with solar battery as charging system
• CPC Class Codes: H01M 14/00 : Electrochemical current or voltage generators not provided for in groups H01M6/00 - H01M12/00; Manufacture thereof
• CPC Class Codes: H01M 14/005 : Photoelectrochemical storage cells light sensitive devices H01G9/20, semiconductors sensitive to light H01L31/00
• CPC Class Codes: H01M 2004/021 : Physical characteristics, e.g. porosity, surface area
• CPC Class Codes: H01M 2008/1293 : Fuel cells with solid oxide electrolytes
• CPC Class Codes: H01M 4/0421 : involving vapour deposition
• CPC Class Codes: H01M 4/0423 : Physical vapour deposition
• CPC Class Codes: H01M 4/0426 : Sputtering
• CPC Class Codes: H01M 4/1391 : of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
• CPC Class Codes: H01M 4/1393 : of electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
• CPC Class Codes: H01M 4/1397 : of electrodes based on inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy
• CPC Class Codes: H01M 4/382 : Lithium H01M4/405 takes precedence
• CPC Class Codes: H01M 4/405 : Alloys based on lithium
• CPC Class Codes: H01M 4/483 : for non-aqueous cells H01M4/485 takes precedence
• CPC Class Codes: H01M 4/581 : Chalcogenides or intercalation compounds thereof
• CPC Class Codes: H01M 4/5825 : Oxygenated metallic salts or polyanionic structures, e.g. borates, phosphates, silicates, olivines
• CPC Class Codes: H01M 4/587 : for inserting or intercalating light metals
• CPC Class Codes: H01M 4/8885 : Sintering or firing
• CPC Class Codes: H01M 4/9016 : Oxides, hydroxides or oxygenated metallic salts
• CPC Class Codes: H01M 50/103 : prismatic or rectangular H01M50/109, H01M50/11 take precedence
• CPC Class Codes: H01M 50/209 : adapted for prismatic or rectangular cells H01M50/216 takes precedence
• CPC Class Codes: H01M 50/403 : Manufacturing processes of separators, membranes or diaphragms
• CPC Class Codes: H01M 6/185 : with oxides, hydroxides or oxysalts as solid electrolytes
• CPC Class Codes: H01M 6/186 : Only oxysalts-containing solid electrolytes
• CPC Class Codes: H01M 6/188 : Processes of manufacture
• CPC Class Codes: H01M 6/40 : Printed batteries , e.g. thin film batteries
• CPC Class Codes: H01M 6/42 : Grouping of primary cells into batteries H01M6/40 takes precedence
• CPC Class Codes: H01M 8/1007 : with both reactants being gaseous or vaporised H01M8/12 takes precedence
• CPC Class Codes: H01M 8/1286 : Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
• CPC Class Codes: H04M 1/0262 : for a battery compartment
• CPC Class Codes: H05K 1/16 : incorporating printed electric components, e.g. printed resistor, capacitor, inductor
• CPC Class Codes: Y02E 10/543 : Solar cells from Group II-VI materials
• CPC Class Codes: Y02E 60/10 : Energy storage using batteries
• CPC Class Codes: Y02E 60/13 : Energy storage using capacitors
• CPC Class Codes: Y02E 60/50 : Fuel cells
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10S 117/902 : Specified orientation, shape, crystallography, or size of seed or substrate
• CPC Class Codes: Y10T 29/49108 : Electric battery cell making
• CPC Class Codes: Y10T 29/49114 : including adhesively bonding
• CPC Class Codes: Y10T 29/49115 : including coating or impregnating
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/5313 : Means to assemble electrical device
• CPC Class Codes: Y10T 29/53135 : Storage cell or battery

Abstract

A method of making a thin-film device including a substrate-supply station that supplies a substrate. The substrate has a first layer on the substrate. Also described is a method and device for depositing a second layer onto the first layer, wherein energy supplied to the second layer aids in layer formation without substantially heating the substrate. Some embodiments include depositing a photovoltaic cell. In some embodiments, the substrate is a flexible material supplied from a roll. Some embodiments include attaching an integrated circuit to the substrate and operatively coupling the integrated circuit to charge the battery from the photovoltaic cell.

Claims

1. A method of making a thin-film device, the method comprising:

providing a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area;

depositing a second layer onto the first layer, wherein the first and second layers form part of a battery; and

depositing one or more other layers on the battery to form a photovoltaic cell.

2. The method according to claim 1, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline layer without substantially heating the substrate, and wherein the battery is a thin-film lithium battery.

3. The method according to claim 1, the method further comprising:

attaching an integrated circuit to the substrate; and

operatively coupling the integrated circuit to charge the battery using current from the photovoltaic cell.

4. The method according to claim 1, wherein at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.

5. The method according to claim 1, wherein the substrate is a flexible material supplied from a roll, and at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.

6. The method according to claim 1, wherein either the first or the second layer forms a cathode layer of the battery, wherein the battery includes the cathode layer, an anode layer, and an electrolyte layer located between and electrically isolating the anode layer from the cathode layer, wherein the anode or the cathode or both include an intercalation material.

7. The method according to claim 1, further comprising depositing an electrical circuit on the battery.

8. The method according to claim 1, wherein the substrate is a rigid material supplied from a cassette, and at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.

9. The method according to claim 1, wherein the substrate is a polymer material having a melting point below about 700 degrees Celsius.

10. The method according to claim 1, wherein the depositing of the second layer includes supplying ion-assist energy to the second layer using ions of at least 5 eV.

11. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 50 eV.

12. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 30 eV.

13. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 20 eV.

14. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 10 eV to about 50 eV.

15. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 10 eV to about 20 eV.

16. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 20 eV to about 50 eV.

17. The method of claim 2, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 20 eV to about 30 eV.

18. The method of claim 1, wherein the supplying of ion-assist energy includes supplying ions having an energy of about 20 eV.

19. The method according to claim 1, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline formation of a layer that includes lithium while controlling a stoichiometry of the crystalline second layer.

20. The method according to claim 1, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline second layer without substantially heating the substrate, and wherein the battery formed is a thin-film battery.

21. The method according to claim 2, wherein the second layer is a LiCoO₂ intercalation material, and the supplying of ion-assist energy includes supplying ionized oxygen that combines with LiCo to form the LiCoO₂ intercalation material.

22. The method according to claim 2, wherein the providing of the substrate comprises:

supplying a substrate base; and

depositing the first layer onto the substrate base to form the substrate, wherein depositing of the first layer includes supplying ion-assist energy to the first layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline first layer without substantially heating the substrate base.

23. The method according to claim 2, wherein the providing of the substrate includes supplying a flexible material supplied from a roll, and the depositing of the second layer on the substrate is performed while the substrate moves in a continuous motion, wherein the second layer forms an electrolyte layer of a battery, wherein the battery includes a cathode layer, an anode layer, and the electrolyte layer located between and electrically isolating the anode layer from the cathode layer, wherein the anode or the cathode or both include an intercalation material.

24. The method of claim 2, wherein the supplying of energy to the first layer includes supplying energy from a high-intensity photo source.

25. The method of claim 2, wherein the supplying of energy to the first layer includes supplying energy from a high-temperature, short-duration heat source.

26. The method of claim 2, wherein the supplying of energy to the first layer includes supplying energy from a short-duration plasma source.

27. The method of claim 2, wherein the supplying of energy to the first layer includes supplying energized particles from a second source simultaneously with supplying electrolyte material from a first source.

28. The method of claim 2, wherein the supplying of energy to the first layer includes supplying laser energy to the surface.

29. The method of claim 1, wherein the depositing of the second layer includes depositing adatoms to form the second layer as a film.

30. A method of making a thin-film device, the method comprising:

supplying a substrate having a major surface area; and

depositing a plurality of layers onto the substrate including supplying energy while depositing a first layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline first layer without substantially heating the substrate; and

supplying energy to a second layer having a different composition to aid in crystalline layer formation while controlling a stoichiometry of the crystalline second layer without substantially heating the substrate.

31. The method of claim 30, wherein the first layer and the second layer form at least part of a battery, and wherein the method further includes depositing one or more other layers on the battery in order to form a photovoltaic cell.

32. The method of claim 30, wherein the supplying of energy to the first layer includes supplying energy from a high-intensity photo source.

33. The method of claim 30, wherein the supplying of energy to the first layer includes supplying energy from a high-temperature, short-duration heat source.

34. The method of claim 30, wherein the supplying of energy to the first layer includes supplying energy from a short-duration plasma source.

35. The method of claim 30, wherein the supplying of energy to the first layer includes supplying energized particles from a second source simultaneously with supplying electrolyte material from a first source.

36. The method of claim 30, wherein the supplying of energy to the first layer includes supplying laser energy to the surface.

37. The method of claim 30, wherein the supplying of energy to the first layer includes supplying ion-assist energy with ions of a first energy, and the supplying of energy to the second layer includes supplying ion-assist energy with ions of a second energy different than the first energy.

38. The method of claim 30, wherein supplying of the substrate includes supplying a continuous set of wafers.

39. The method of claim 30, wherein the first and second layers form parts of a thin-film battery.

40. The method of claim 30, wherein the first and second layers form parts of a capacitor.

41. The method of claim 30, wherein the first and second layers, respectively, form parts of a thin-film battery and a device powered by the thin-film battery, respectively.

42. The method of claim 30, wherein the first and second layers, respectively, form parts of a thin-film battery and a device powered by the thin-film battery, respectively, wherein the device is deposited onto the thin-film battery.

43. The method of claim 30, further comprising depositing a set of traces for electrically connecting a device to the thin-film battery.

44. The method of claim 43, further comprising placing one or more components onto the traces.

45. The method of claim 30, further comprising depositing an energy-conversion device on the thin-film device.

46. The method of claim 30, wherein the substrate is a polymer material having a melting point below about 700 degrees Celsius.

47. The method of claim 30, wherein the energizing of the second layer includes supplying ions of at least 5 eV.

48. The method of claim 30, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 50 eV.

49. The method of claim 30, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 20 eV.

50. The method of claim 30, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 10 eV to about 20 eV.

51. The method of claim 30, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 20 eV to about 30 eV.

52. The method of claim 30, wherein the supplying of ion-assist energy includes supplying ions having an energy of about 20 eV.

53. The method of claim 48, wherein the substrate is a polymer material having a melting point below about 700 degrees Celsius, and wherein the energizing of the second layer includes supplying ions of at least 5 eV.

54. A method of making a thin-film device, the method comprising:

providing a substrate base;

depositing a first layer onto the substrate base, wherein the depositing of the first layer further includes supplying an amount of ion-assist energy to the first layer to aid in crystalline layer formation without substantially heating the substrate;

depositing a second layer onto the first layer, wherein the first and second layers form part of a battery, wherein the depositing of the second layer further includes supplying an amount of ion-assist energy to the second-layer to aid in crystalline layer formation without substantially heating the substrate, and wherein the battery is a thin-film lithium battery; and

depositing one or more other layers on the battery to form a photovoltaic cell, attaching an integrated circuit to the substrate; and

operatively coupling the integrated circuit to charge the battery using current from the photovoltaic cell.

55. The method of claim 54, wherein the supplying of ion-assist energy includes supplying ions having an energy in the range of about 5 eV to about 50 eV.

56. The method of claim 54, wherein the substrate is a flexible material supplied from a roll, and at least some of the layers are deposited on the substrate while the substrate moves in a continuous motion.

57. The method of claim 54, wherein the substrate includes a polymer material having a melting point below about 700 degrees Celsius.