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Vacuum processing apparatus and operating method therefor

  • US 20040187338A1
  • Filed: 03/10/2004
  • Published: 09/30/2004
  • Est. Priority Date: 08/29/1990
  • Status: Active Grant
First Claim
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1. A processing apparatus, comprising;

  • a plurality of processing chambers for processing substrates;

    cassette mount tables for mounting cassettes storing a plurality of substrates to be processed or processed substrates;

    a transfer device for transferring said substrates being capable of being controlled such that at least one of said substrates to be processed can be taken out of any location in said plurality of cassettes mounted on said plurality of cassette mount tables; and

    control means (a) for transferring substrates to be processed from any location in said one of the cassettes mounted in the plurality of cassette mount tables to at least one of the processing chambers via said transfer device and (b) for transferring processed substrates in said processing chambers to the original locations of the original cassettes, in which the substrates are stored prior to processing, via said transfer device.

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