Pressure sensor having metallic diaphragm with convexity
First Claim
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1. A pressure sensor comprising:
- a diaphragm for sealing liquid, wherein the diaphragm includes a plurality of convexities, which are disposed concentrically on the diaphragm, wherein each convexity has a circular arc cross section in a radial direction and has a ring shape, wherein each convexity has a length of the circular arc representing as L, a height of the convexity representing as H, a width of the convexity in the radial direction representing as W, and a pitch between two adjacent convexities in the radial direction representing as P, wherein the diaphragm has an effective radius representing as R, and a distance between a center of the diaphragm and a center of the convexity disposed utmost outside of the diaphragm representing as r0, the effective radius of the diaphragm being defined as a radius of a part of the diaphragm applied with pressure, wherein the sensor has a configuration factor representing as α
, which is defined as;
wherein the configuration factor is in a range between 2.5 and 3.5.
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Abstract
A pressure sensor includes a diaphragm for sealing liquid. The diaphragm includes a plurality of convexities, which are disposed concentrically on the diaphragm. Each convexity has a circular arc cross-section in a radial direction and has a ring shape. The sensor has a configuration factor. The configuration factor is in a range between 2.5 and 3.5. The diaphragm of the sensor has excellent deformability so that detection error of the sensor is reduced.
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Citations
6 Claims
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1. A pressure sensor comprising:
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a diaphragm for sealing liquid, wherein the diaphragm includes a plurality of convexities, which are disposed concentrically on the diaphragm, wherein each convexity has a circular arc cross section in a radial direction and has a ring shape, wherein each convexity has a length of the circular arc representing as L, a height of the convexity representing as H, a width of the convexity in the radial direction representing as W, and a pitch between two adjacent convexities in the radial direction representing as P, wherein the diaphragm has an effective radius representing as R, and a distance between a center of the diaphragm and a center of the convexity disposed utmost outside of the diaphragm representing as r0, the effective radius of the diaphragm being defined as a radius of a part of the diaphragm applied with pressure, wherein the sensor has a configuration factor representing as α
, which is defined as;
wherein the configuration factor is in a range between 2.5 and 3.5. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification