Semiconductor device having multiple substrates
First Claim
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1. A semiconductor device comprising:
- a first substrate including first, second and third layers; and
a second substrate including fourth, fifth and sixth layers;
wherein the first substrate provides an electric device, wherein the second substrate provides a physical quantity sensor, and wherein the first layer of the first substrate and the fourth layer of the second substrate are shields for protecting the electric device and the physical quantity sensor.
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Abstract
A semiconductor device includes a first substrate including first, second and third layers; and a second substrate including fourth, fifth and sixth layers. The first substrate provides an electric device. The second substrate provides a physical quantity sensor. The first layer of the first substrate and the fourth layer of the second substrate are shields for protecting the electric device and the physical quantity sensor. The device is protected from outside disturbance without adding an additional shield.
26 Citations
18 Claims
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1. A semiconductor device comprising:
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a first substrate including first, second and third layers; and
a second substrate including fourth, fifth and sixth layers;
wherein the first substrate provides an electric device, wherein the second substrate provides a physical quantity sensor, and wherein the first layer of the first substrate and the fourth layer of the second substrate are shields for protecting the electric device and the physical quantity sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor device comprising:
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a first substrate including first, second and third layers; and
a second substrate;
wherein the first substrate provides one of an electric device and a physical quantity sensor, wherein the second substrate provides the other one of the electric device and the physical quantity sensor, and wherein the first layer of the first substrate is a shield for protecting the electric device and the physical quantity sensor. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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Specification