Microelectromechanical isolating circuit
First Claim
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1. An electrical isolator comprising:
- a MEMS switch array having an actuator receiving an actuator signal to alternately connect a capacitor between two input terminals and two output terminals, the MEMS switch array operating so that in a first switch state, the capacitor is connected to the input terminals and not the output terminals, and in a second switch state, the capacitor is connected to the output terminals and not the input terminals; and
an actuator signal generator providing the actuator signal to repeatedly switch the MEMS switch array between the first and second states.
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Abstract
Microelectromechanical (MEMS) switches are used to implement a flying capacitor circuit transferring of electrical power while preserving electrical isolation for size critical applications where transformers or coupling capacitors would not be practical. In one embodiment, the invention may be used to provide input circuits that present a programmable input impedance. The circuit may be modified to provide for power regulation.
92 Citations
28 Claims
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1. An electrical isolator comprising:
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a MEMS switch array having an actuator receiving an actuator signal to alternately connect a capacitor between two input terminals and two output terminals, the MEMS switch array operating so that in a first switch state, the capacitor is connected to the input terminals and not the output terminals, and in a second switch state, the capacitor is connected to the output terminals and not the input terminals; and
an actuator signal generator providing the actuator signal to repeatedly switch the MEMS switch array between the first and second states. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A MEMS device comprising:
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a MEMS switch array receiving at least one actuator signal to alternately connect a capacitor between two input terminals and two output terminals, the MEMS switch array operating so that in a first switch state, the capacitor is connected to the input terminals and not the output terminals and in a second switch state, the capacitor is connected to the output terminals and not the input terminals, wherein the switching of the MEMS switch array is according to at least one actuator signal;
a shunt for discharging the capacitor when it is connected to the output terminals, either transferring the charge to the supply return or to a supply capacitor for subsequent use in powering circuitry; and
a controller providing the actuator signal to the MEMS switch array to control the duty cycle of switching to present a predetermined effective impedance at the input terminal. - View Dependent Claims (13, 14, 15, 19, 20, 21, 22, 23)
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16. An input circuit for an industrial controller comprising:
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at least one MEMS switch array receiving at least one actuator signal to alternately connect a capacitor between two input terminals and two output terminals, the MEMS switch array operating so that in a first switch state, the capacitor is connected to the input terminals and not the output terminals and, in a second switch state, the capacitor is connected to the output terminals and not the input terminals, wherein the switching of the MEMS switch array is according to at least one actuator signal;
a shunt for discharging the capacitor when it is connected to the output terminals;
a controller providing the actuator signal to the MEMS switch array to control the duty cycle of switching to present a predetermined effective impedance at the input terminal; and
a detector attached to the output terminals to deduce a predetermined switching voltage at the input terminals
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17. An isolating input circuit for an industrial control comprising:
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a MEMS isolator having an actuator communicating with a set of input terminals and attached to one end of a movable element joined through an insulating section with a sensor element whereby electrical signals attached to the actuator are mechanically communicated in isolation from the sensor element;
a MEMS switch connected across the input terminals and activated by a switch signal to shunt the input terminals; and
a controller providing the switch signal to control the duty cycle of switching to present a predetermined effective impedance at the input terminal. - View Dependent Claims (18)
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24. A method for electrically isolated power transfer comprising the steps of:
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(a) at a first time, connecting a first and second terminal of a capacitor to corresponding input terminals using a MEMS switch array;
(b) at a second time, connecting the first and second terminal of the capacitor to corresponding output terminals using the MEMS switch array; and
(c) repeating steps (a) and (b) repeatedly;
whereby electrical power may be transferred between the input terminals and the output terminals while maintaining electrical isolation between the input and output terminals. - View Dependent Claims (25, 26, 27, 28)
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Specification