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Method of aligning a template with a substrate employing moire patterns

  • US 20040189996A1
  • Filed: 04/05/2004
  • Published: 09/30/2004
  • Est. Priority Date: 07/16/2000
  • Status: Active Grant
First Claim
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1. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:

  • sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moire pattern when said template and said substrate are in a desired spatial relationship.

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