Method of aligning a template with a substrate employing moire patterns
First Claim
1. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:
- sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moire pattern when said template and said substrate are in a desired spatial relationship.
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Abstract
The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.
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Citations
26 Claims
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1. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:
sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moire pattern when said template and said substrate are in a desired spatial relationship. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:
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positioning a formable material, having a volume associated therewith, between said substrate and said template, with said distance being a function of said volume; and
sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moire pattern when said template and said substrate are in a desired spatial relationship. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A method of determining an alignment between a substrate and a template, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:
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positioning said template to be spaced-apart from said substrate having a distance defined therebetween, with said first pattern being in superimposition with said second pattern; and
sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moiré
pattern when said template and said substrate are in a desired spatial relationship. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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Specification