Method of aligning a template with a substrate employing moire patterns

• US 20040189996A1
• Filed: 04/05/2004
• Published: 09/30/2004
• Est. Priority Date: 07/16/2000
• Status: Active Grant

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Colburn, Matthew, Choi, Byung J., Bailey, Todd, Sreenivasan, S. V.
• Granted Patent: US 6,986,975 B2
• Time in Patent Office: Days
• US Class Current: 356/401
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 35/0888 using transparant moulds
• CPC Class Codes: B29C 37/005 Compensating volume or shape change during moulding, in general
• CPC Class Codes: B29C 37/0053 Moulding articles characterised by the shape of the surface, e.g. ribs, high polish mould construction therefor B29C33/42; surface shaping of articles B29C59/00; by incorporating filler in or near the surface B29C70/64
• CPC Class Codes: B29C 43/003 characterised by the choice of material
• CPC Class Codes: B29C 43/021 characterised by the shape of the surface
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: Y10S 101/36 Means for registering or alignment of print plates on print press structure
• CPC Class Codes: Y10T 428/24802 Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Abstract

The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.

Claims

1. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:

sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moire pattern when said template and said substrate are in a desired spatial relationship.

2. The method as recited in claim 1 further including positioning formable material, having a thickness associated therewith, between said substrate and said template, with said distance being a function of said thickness.

3. The method as recited in claim 1 further including positioning formable material, having a thickness associated therewith, between said substrate and said template, with said distance being a function of said thickness and less than approximately 0.25 micrometer.

4. The method as recited in claim 1 further including positioning formable material, having a thickness associated therewith, between said substrate and said template, with said distance being a function of said thickness and less than approximately 0.1 micrometer.

5. The method as recited in claim 1 further including positioning formable material, having a thickness associated therewith, between said substrate and said template, wherein said distance is greater than said thickness.

6. The method as recited in claim 1 further including positioning formable material on said substrate as a plurality of spaced-apart droplets.

7. The method as recited in claim 1 further including positioning a line of formable material on said substrate, with said line having opposed ends and being continuous between said opposed ends.

8. The method as recited in claim 1 further including depositing, on said substrate, a continuous line of formable material, with said continuous line having an circular shape.

9. The method as recited in claim 1 further including disposing, upon said substrate, a serpentine line of formable material.

10. The method as recited in claim 1 wherein sensing further includes sensing said first pattern and said second pattern concurrently.

11. The method as recited in claim 1 further including positioning said template and said substrate such that said distance is established within a depth of focus of an optical measurement tool.

12. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:

positioning a formable material, having a volume associated therewith, between said substrate and said template, with said distance being a function of said volume; and

sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moire pattern when said template and said substrate are in a desired spatial relationship.

13. The method as recited in claim 12 further including spreading said formable material to form a layer between said substrate and said template, with said layer having a thickness associated therewith, with positioning further including establishing said distance to be greater than said thickness.

14. The method as recited in claim 12 wherein said sensing further including sensing said first pattern and said second pattern concurrently.

15. The method as recited in claim 12 further including positioning said template and said substrate such that said distance is established within a depth of focus of an optical measurement tool.

16. The method as recited in claim 12 wherein positioning further includes position a line of formable material on said substrate, with said line having opposed ends and being continuous between said opposed ends.

17. The method as recited in claim 12 wherein positioning further includes depositing, on said substrate, a continuous line of formable material, with said continuous line having an circular shape.

18. The method as recited in claim 12 wherein position further includes disposing, upon said substrate, a serpentine line of formable material.

19. A method of determining an alignment between a substrate and a template, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:

positioning said template to be spaced-apart from said substrate having a distance defined therebetween, with said first pattern being in superimposition with said second pattern; and

sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a moiré

pattern when said template and said substrate are in a desired spatial relationship.

20. The method as recited in claim 19 further including positioning formable material, having a thickness associated therewith, between said substrate and said template, wherein said distance is a function of said thickness.

21. The method as recited in claim 19 further including positioning formable material, having a thickness associated therewith, between said substrate and said template, wherein said distance is greater than said thickness.

22. The method as recited in claim 19 wherein said sensing further including sensing said first pattern and said second pattern concurrently.

23. The method as recited in claim 19 wherein positioning further includes arranging said template and said substrate such that said distance is established within a depth of focus of an optical measurement tool.

24. The method as recited in claim 19 further including positioning a line of formable material on said substrate, with said line having opposed ends and being continuous between said opposed ends.

25. The method as recited in claim 19 further including depositing, on said substrate, a continuous line of formable material, with said continuous line having an circular shape.

26. The method as recited in claim 19 further including disposing, upon said substrate, a serpentine line of formable material.