Multi-tilt micromirror systems with concealed hinge structures
First Claim
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1. A micromirror device comprising:
- a substrate with electrical components including address circuitry;
a micromirror; and
a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation.
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Abstract
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above a substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.
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Citations
59 Claims
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1. A micromirror device comprising:
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a substrate with electrical components including address circuitry;
a micromirror; and
a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A micromirror device comprising:
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a substrate with electrical components including address circuitry;
a micromirror; and
a support structure underlying said micromirror and joining said substrate with said micromirror, said support structure including a first torsion component having first and second ends mounted to said substrate and a second torsion component having first and second ends mounted to opposite ends of said micromirror, said first and second torsion components intersecting one another to provide a universal joint configured to permit rotation of said micromirror about multiple axes of rotation. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A micromirror assembly, comprising:
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a substrate with electrical components including address circuitry; and
a plurality of micromirror devices each including a micromirror, at least one of said micromirror devices comprising a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted to said substrate at two locations and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation. - View Dependent Claims (45, 46, 47, 48, 49)
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50. An optical switching mechanism, comprising:
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a first array of optical reflectors adapted to receive and reflect optical signals from at least one optical input source; and
a second array of optical reflectors adapted to receive optical signals reflected from said first array of optical reflectors and reflect the optical signals toward at least one optical output;
at least one of said optical reflectors comprising an assembly of micromirror devices;
at least one of said micromirror devices being adapted for three dimensional orientation. - View Dependent Claims (51, 52, 53, 54, 55, 56, 57, 58, 59)
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Specification