Optical recording medium, method for manufacturing the same and target used for sputtering process
First Claim
1. An optical recording medium comprising at least one recording layer containing as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si.
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Accused Products
Abstract
An optical recording medium includes a recording layer containing as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si and the alloy contained in the recording layer as a primary component has a composition [x1, y1, z1] in terms of the ternary composition diagram that falls within a region of a pentagon defined by straight lines connecting points [57, 43, 0], [0, 55, 45], [15, 0, 85], [89, 11, 0] and [0, 16, 84] in the ternary composition diagram.
According to the thus configured optical recording medium, only minimal load is placed on the global environment.
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Citations
8 Claims
- 1. An optical recording medium comprising at least one recording layer containing as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si.
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7. A method for manufacturing an optical recording medium comprising of a step of forming at least one recording layer of an optical recording medium by a sputtering process using a target that contains as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si, the alloy contained therein as a primary component having a composition [x2, Y2, z2] in terms of a ternary composition diagram in which x2, y2 and z2 represent atomic ratios (atomic %) of Fe, Al and Si. and each of x2, y2 and z2 is defined to fall within a region of a pentagon defined by straight lines connecting a point A′
- [55, 45, 0], a point B′
[0, 50, 50], a point C′
[9, 0, 91], a point D′
[87, 13, 0] and a point E [0, 10, 90] in the ternary composition diagram.
- [55, 45, 0], a point B′
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8. A target used for a sputtering process that contains as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si, the alloy contained therein as a primary component having a composition [x2, y2, z2] in terms of a ternary composition diagram in which x2, Y2 and z2 represent atomic ratios (atomic %) of Fe, Al and Si. and each of x2, Y2 and z2 is defined to fall within a region of a pentagon defined by straight lines connecting a point A′
- [55, 45, 0], a point B′
[0, 50, 50], a point C′
[9, 0, 91], a point D′
[87, 13, 0] and a point E [0, 10, 90] in the ternary composition diagram.
- [55, 45, 0], a point B′
Specification