Optical recording medium, method for manufacturing the same and target used for sputtering process

• US 20040191462A1
• Filed: 03/22/2004
• Published: 09/30/2004
• Est. Priority Date: 03/24/2003
• Status: Active Grant

• Current Assignee: Pioneer Corporation, TDK Corporation
• Original Assignee: Pioneer Corporation, TDK Corporation
• Inventors: Aoshima, Masaki, Inoue, Hiroyasu, Mishima, Koji, Hosoda, Yasuo, Iida, Tetsuya, Mitsumori, Ayumi, Yamaguchi, Masataka, Sato, Megumi
• Granted Patent: US 6,929,840 B2
• Time in Patent Office: Days
• US Class Current: 428/64.4
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
• CPC Class Codes: G11B 2007/24306 transition metal elements of groups 3-10
• CPC Class Codes: G11B 2007/24312 group 14 elements (e.g. Si, Ge, Sn)
• CPC Class Codes: G11B 7/243 comprising inorganic materials only, e.g. ablative layers
• CPC Class Codes: G11B 7/258 of reflective layers
• CPC Class Codes: G11B 7/259 based on silver
• CPC Class Codes: G11B 7/266 Sputtering or spin-coating layers sputtering in general C23C14/24; spin-coating in general B05D1/005
• CPC Class Codes: Y10T 428/21 Circular sheet or circular blank

Abstract

An optical recording medium includes a recording layer containing as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si and the alloy contained in the recording layer as a primary component has a composition [x₁, y₁, z₁] in terms of the ternary composition diagram that falls within a region of a pentagon defined by straight lines connecting points [57, 43, 0], [0, 55, 45], [15, 0, 85], [89, 11, 0] and [0, 16, 84] in the ternary composition diagram.

According to the thus configured optical recording medium, only minimal load is placed on the global environment.

Claims

1. An optical recording medium comprising at least one recording layer containing as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si.

2. An optical recording medium in accordance with claim 1, wherein the alloy contained in the at least one recording layer as a primary component has a composition [x₁, y₁, z₁] in terms of the ternary composition diagram that falls within a region of a pentagon defined by straight lines connecting points [57, 43, 0], [0, 55, 45], [15, 0, 85], [89, 11, 0] and [0, 16, 84] in the ternary composition diagram.

3. An optical recording medium in accordance with claim 1, which further comprises a dielectric layer on at least one side of the at least one recording layer.

4. An optical recording medium in accordance with claim 2, which further comprises a dielectric layer on at least one side of the at least one recording layer.

5. An optical recording medium in accordance with claim 1, which further comprises dielectric layers on opposite sides of the at least one recording layer.

6. An optical recording medium in accordance with claim 2, which further comprises dielectric layers on opposite sides of the at least one recording layer.

7. A method for manufacturing an optical recording medium comprising of a step of forming at least one recording layer of an optical recording medium by a sputtering process using a target that contains as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si, the alloy contained therein as a primary component having a composition [x₂, Y₂, z₂] in terms of a ternary composition diagram in which x₂, y₂ and z₂ represent atomic ratios (atomic %) of Fe, Al and Si. and each of x₂, y₂ and z₂ is defined to fall within a region of a pentagon defined by straight lines connecting a point A′

[55, 45, 0], a point B′

[0, 50, 50], a point C′

[9, 0, 91], a point D′

[87, 13, 0] and a point E [0, 10, 90] in the ternary composition diagram.

8. A target used for a sputtering process that contains as a primary component an alloy containing at least two elements selected from the group consisting of Fe, Al and Si, the alloy contained therein as a primary component having a composition [x₂, y₂, z₂] in terms of a ternary composition diagram in which x₂, Y₂ and z₂ represent atomic ratios (atomic %) of Fe, Al and Si. and each of x₂, Y₂ and z₂ is defined to fall within a region of a pentagon defined by straight lines connecting a point A′

[55, 45, 0], a point B′

[0, 50, 50], a point C′

[9, 0, 91], a point D′

[87, 13, 0] and a point E [0, 10, 90] in the ternary composition diagram.