Method for manufacturing samll crystal resonator
First Claim
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1. A method of manufacturing a crystal resonator using a crystal substrate, comprising the steps of:
- forming a crystal resonator area and side electrode shielding/formation blocks thereabout on said crystal substrate through etching by leaving a partial connection section and with both areas kept separate from each other with a gap; and
applying vapor deposition through said gap diagonally toward the side of said crystal substrate, producing an area where a film is formed on said side and an area where film formation is prevented by the existence of the side electrode shielding/formation blocks and thereby forming an electrode film bisected in the thickness direction of the substrate on the side.
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Abstract
A crystal resonator area and side electrode shielding/formation blocks thereabout are formed on a crystal substrate through etching with both areas kept separate from each other with a gap. Vapor deposition is diagonally applied through this gap toward the side of the crystal substrate to thereby form an electrode film divided into two portions in the thickness direction of the substrate on the side.
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Citations
11 Claims
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1. A method of manufacturing a crystal resonator using a crystal substrate, comprising the steps of:
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forming a crystal resonator area and side electrode shielding/formation blocks thereabout on said crystal substrate through etching by leaving a partial connection section and with both areas kept separate from each other with a gap; and
applying vapor deposition through said gap diagonally toward the side of said crystal substrate, producing an area where a film is formed on said side and an area where film formation is prevented by the existence of the side electrode shielding/formation blocks and thereby forming an electrode film bisected in the thickness direction of the substrate on the side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification