METHOD FOR ANALYZING WAFER TEST PARAMETERS
First Claim
1. A method for analyzing wafer test parameters of a plurality of lots of wafers, each lot of the wafers comprising a lot number, each wafer of each lot comprising at least one wafer test parameter generated by performing at least one wafer test item stored in a database, parameters related to at least one sample test item, one in-line quality control (QC) item and one process step item related to the wafer test item being stored in the database, the method comprising:
- dividing the lots of wafers into at least a high yield group and a low yield group based on yield of the lots;
obtaining a first standard value within a first range by analyzing the wafer test parameters of the wafers in the high yield group;
performing a first comparison step to compare each wafer test parameter of each lot in the low yield group with the first standard value and delete lot numbers of lots with wafer test parameters within the first range;
determining a first amount of residual lots in the low yield group after the first comparison step; and
in response to the first amount of residual lots in the low yield group not equaling to zero, performing a first searching step to determine which item of sample test items, in-line QC items and process step items is related to the wafer test item of each residual lot in the low yield group from the database.
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Abstract
A plurality of lots of wafers, each lot of wafers having a lot number and each wafer of each lot having at least one test parameter generated by performing at least one wafer test item stored in a database, are divided into a high yield group and a low yield group. By analyzing the wafer test parameters of the wafers in the high yield group, a first standard value within a first range is obtained. A first comparison step is then performed to compare each wafer test parameter of each lot in the low yield group with the first standard value and delete lot numbers of lots with wafer test parameters within the first range. Finally, a first amount of residual lots in the low yield group is determined. In response to the first amount of residual lots in the low yield group not equaling to zero, a first searching step is performed to which item of sample test items, in-line QC items and process step items is related to the wafer test item of each residual lot in the low yield group in the database.
14 Citations
36 Claims
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1. A method for analyzing wafer test parameters of a plurality of lots of wafers, each lot of the wafers comprising a lot number, each wafer of each lot comprising at least one wafer test parameter generated by performing at least one wafer test item stored in a database, parameters related to at least one sample test item, one in-line quality control (QC) item and one process step item related to the wafer test item being stored in the database, the method comprising:
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dividing the lots of wafers into at least a high yield group and a low yield group based on yield of the lots;
obtaining a first standard value within a first range by analyzing the wafer test parameters of the wafers in the high yield group;
performing a first comparison step to compare each wafer test parameter of each lot in the low yield group with the first standard value and delete lot numbers of lots with wafer test parameters within the first range;
determining a first amount of residual lots in the low yield group after the first comparison step; and
in response to the first amount of residual lots in the low yield group not equaling to zero, performing a first searching step to determine which item of sample test items, in-line QC items and process step items is related to the wafer test item of each residual lot in the low yield group from the database. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for analyzing wafer test parameters of a plurality of lots of wafers, each lot of the wafers comprising a lot number, each wafer of each lot comprising at least one wafer test parameter generated by performing at least one wafer test item stored in a database, the wafer test item comprising a plurality of electrical tests performed on each die of each wafer, the wafer test parameters comprising statistic results of the electrical tests, parameters related to at least one sample test item, one in-line quality control (QC) item and one process step item related to the wafer test item being stored in the database, the method comprising:
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dividing the lots of wafers into at least a high yield group and a low yield group based on yield of the lots;
obtaining a first standard value within a first range by analyzing the wafer test parameters of the wafers in the high yield group;
performing a first comparison step to compare each wafer test parameter of each lot in the low yield group with the first standard value and delete lot numbers of lots with wafer test parameters within the first range;
determining a first amount of residual lots in the low yield group after the first comparison step; and
in response to the first amount of residual lots in the low yield group not equaling to zero, performing following steps;
searching for parameters of the electrical tests performed on each die of each wafer in the low yield group to define dies failing in the electrical tests as target dies and obtain a distribution chart of target dies of each wafer;
comparing the distribution chart of target dies of each wafer with a distribution chart of the wafer test parameters of the corresponding wafer to obtain an overlapping ratio;
marking wafers with the overlapping ratio greater than an second standard value as target wafers;
selecting lot numbers of lots comprising an amount of target wafers greater than a third standard value; and
determining which item of the sample test items and the process step items is related to the wafer test item of each residual lot in the low yield group in the database. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification