High-Q inductor device with a shielding pattern embedded in a substrate
First Claim
1. A high-Q inductor device, comprising:
- a semiconductor substrate having a surface;
an insulating layer formed over the surface of the semiconductor substrate;
a conductive film formed over the insulating layer and separated from the semiconductor substrate, the conductive film having two terminals and serving as a current path; and
a shielding pattern embedded in the semiconductor substrate, including;
a plurality of isolation portions distributed in the semiconductor substrate, each of which has a bottom intruding the semiconductor substrate and a top appearing from the surface of the semiconductor substrate, thereby dividing the surface into a plurality of regions unconnected with each other, and a plurality of highly doped portions formed in the semiconductor substrate and close to the surface, each of which is electrically insulated from each other through the plurality of isolation portions.
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Accused Products
Abstract
An insulating layer is formed over a surface of a semiconductor substrate. A conductive film is formed over the insulating layer and separated from the semiconductor substrate. A shielding pattern is embedded within the semiconductor substrate and includes a plurality of isolation portions and a plurality of highly doped portions. The isolation portions are distributed within the semiconductor substrate for dividing the surface of the semiconductor into a plurality of regions unconnected with each other. The highly doped portions are formed within the semiconductor substrate and close to the surface, electrically insulated from each other by the isolation portions. The shielding pattern may further include a plurality of silicide layers formed on the highly doped portions and an ion implanted well for accommodating the isolation portions and the highly doped portions.
30 Citations
16 Claims
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1. A high-Q inductor device, comprising:
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a semiconductor substrate having a surface;
an insulating layer formed over the surface of the semiconductor substrate;
a conductive film formed over the insulating layer and separated from the semiconductor substrate, the conductive film having two terminals and serving as a current path; and
a shielding pattern embedded in the semiconductor substrate, including;
a plurality of isolation portions distributed in the semiconductor substrate, each of which has a bottom intruding the semiconductor substrate and a top appearing from the surface of the semiconductor substrate, thereby dividing the surface into a plurality of regions unconnected with each other, and a plurality of highly doped portions formed in the semiconductor substrate and close to the surface, each of which is electrically insulated from each other through the plurality of isolation portions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification