Method and apparatus for protecting wiring and integrated circuit device
First Claim
1. A method of protecting a conductor in a micromachined device, said method comprising:
- providing a substrate for a micromachined device;
providing a conductor as part of said micromachined device for use in conducting electrical signals during operation of said micromachined device;
providing a protective covering for said conductor so that said conductor is disposed between said substrate and said protective covering and so that said protective covering is configured so as to form a tunnel relative to said conductor.
1 Assignment
0 Petitions
Accused Products
Abstract
A method and apparatus for protecting a conductor in an integrated circuit. A protective covering can be disposed over a conductor for a substantial length along the conductor while allowing a portion of the conductor to be exposed. The protective covering can be configured as a tunnel which runs for a substantial length along the conductor and can be operable to prevent the occurrence of electrical shorts during operation of the integrated circuit. According to one embodiment of the invention the integrated circuit can be configured as a micromachined device with active mechanical components exposed to the atmosphere.
31 Citations
83 Claims
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1. A method of protecting a conductor in a micromachined device, said method comprising:
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providing a substrate for a micromachined device;
providing a conductor as part of said micromachined device for use in conducting electrical signals during operation of said micromachined device;
providing a protective covering for said conductor so that said conductor is disposed between said substrate and said protective covering and so that said protective covering is configured so as to form a tunnel relative to said conductor. - View Dependent Claims (2, 3, 4, 5, 7)
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6. (Cancelled)
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8-14. -14 (cancelled)
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15. A method of protecting a conductor in a micromachined device, said method comprising:
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providing a micromachined device comprising a substrate;
providing a conductor as part of said micromachined device;
providing as part of said micromachined device a protective covering, wherein said conductor is disposed between said protective covering and said substrate of said micromachined device and wherein said protective layer of material is configured so as to form a tunnel relative to said conductor. - View Dependent Claims (16, 17, 18, 19, 21)
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20. (Cancelled)
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22-31. -31 (cancelled)
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32. A method of providing a micromachined apparatus, said method comprising:
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providing a substrate;
disposing a bonding pad over said substrate;
disposing a conductor over said substrate, wherein said conductor is electrically coupled with said bonding pad;
disposing an active mechanical component over said substrate, wherein said active mechanical component is configured to move relative to said substrate during operation of said micromachined apparatus;
disposing a protective cover over said conductor so that said conductor is disposed between said protective covering and said substrate and so that said protective cover is configured so as to form a tunnel relative to said conductor. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 41)
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40. (Cancelled)
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42. A method of configuring a micromachined apparatus, said method comprising:
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providing a bonding pad as part of said micromachined apparatus;
providing an active mechanical component, wherein said active mechanical component is configured to move during operation of said micromachined apparatus;
disposing a conductor between said active mechanical component and said bonding pad;
protecting at least a portion of said conductor disposed between said active mechanical component and said bonding pad with a protective layer of material operable to protect said conductor from electrical shorts and configured so as to form a tunnel relative to said conductor. - View Dependent Claims (43, 44, 45, 46, 48)
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47. (cancelled)
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49-55. -55 (cancelled)
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56. A method comprising:
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providing a substrate;
disposing a conductor over said substrate operable for conducting electrical signals;
configuring an equipotential barrier at least partially around said conductor operable for protecting said conductor from electrical shorts, wherein said configuring said equipotential barrier comprises;
configuring a tunnel of electrically conductive material over said conductor; and
coupling said electrically conductive material with said substrate. - View Dependent Claims (57, 58)
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- 59. (Cancelled)
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61-65. -65 (Cancelled)
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66. A method of protecting a conductor in a micromachined device, said method comprising:
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providing a substrate for a micromachined device;
providing a conductor as part of said micromachined device for use in conducting electrical signals during operation of said micromachined device;
providing a protective covering for said conductor so that said conductor is disposed between said substrate and said protective covering;
electrically coupling said protective covering with said substrate so as to configure a ground ring around said conductor. - View Dependent Claims (67, 68, 69, 70)
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71. A method of providing a micromachined apparatus, said method comprising:
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providing a substrate;
disposing a bonding pad over said substrate;
disposing a conductor over said substrate, wherein said conductor is electrically coupled with said bonding pad;
disposing an active mechanical component over said substrate, wherein said active mechanical component is configured to move relative to said substrate during operation of said micromachined apparatus;
disposing a protective cover over said conductor so that said conductor is disposed between said protective covering and said substrate;
electrically coupling said protective cover with said substrate so as to configure a ground ring around said conductor. - View Dependent Claims (72, 73, 74, 75, 76, 77, 78)
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79. A method of configuring a micromachined apparatus, said method comprising:
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providing a bonding pad as part of said micromachined apparatus;
providing an active mechanical component, wherein said active mechanical component is configured to move during operation of said micromachined apparatus;
disposing a conductor between said active mechanical component and said bonding pad;
protecting at least a portion of said conductor disposed between said active mechanical component and said bonding pad with a protective layer of material operable to protect said conductor from electrical shorts;
configuring said protective layer of material so as to form at least part of a ground ring around said conductor. - View Dependent Claims (80, 81, 82, 83)
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Specification