Method for forming an arrangement of barrier layers on a polymeric substrate
First Claim
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1. A method for forming an arrangement of two barrier layers on a substrate, comprising:
- forming a first ceramic barrier layer on a substrate, wherein the first ceramic barrier layer has a first surface and a second surface and the first surface is closer to the substrate than the second surface;
modifying at least a portion of the second surface of the first ceramic barrier layer to introduce first nucleation sites on the second surface; and
forming a second ceramic barrier layer on the first ceramic barrier layer, wherein the second ceramic barrier layer is initiated at the first nucleation sites.
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Abstract
Forming an arrangement of two ceramic barrier layers (5, 10) on a polymeric substrate (1) includes the steps of applying a first ceramic barrier layer (5) on the substrate (1). The surface (5A) of the first barrier layer (5) is modified to introduce new nucleation sites on the surface of the first layer. A second ceramic barrier layer (10) is formed on the first barrier layer (5) using the new nucleation sites. The second ceramic barrier layer is deposited with independent nucleation sites such that a barrier stack of enhanced quality is formed.
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Citations
27 Claims
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1. A method for forming an arrangement of two barrier layers on a substrate, comprising:
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forming a first ceramic barrier layer on a substrate, wherein the first ceramic barrier layer has a first surface and a second surface and the first surface is closer to the substrate than the second surface;
modifying at least a portion of the second surface of the first ceramic barrier layer to introduce first nucleation sites on the second surface; and
forming a second ceramic barrier layer on the first ceramic barrier layer, wherein the second ceramic barrier layer is initiated at the first nucleation sites. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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