COMPLEX MULTIVARIATE ANALYSIS SYSTEM AND METHOD

• US 20040199358A1
• Filed: 04/03/2003
• Published: 10/07/2004
• Est. Priority Date: 04/03/2003
• Status: Active Grant

• Current Assignee: Powerchip Semiconductor Manufacturing Corp. (Powerchip Technology Corporation)
• Original Assignee: Powerchip Semiconductor Corporation (Powerchip Technology Corporation)
• Inventors: Tai, Hung-En
• Granted Patent: US 6,904,384 B2
• Time in Patent Office: Days
• US Class Current: 702/179
• CPC Class Codes: G05B 23/024 Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks

Abstract

A complex multivariate analysis systemis provided. The system has a storage module, a selecting module, an analyzing module, a correlation searching module and a reporting module. The storage module includes a first database and a second database. The first database records at least two data sets, each of the data sets including a plurality of items associated with a manufacturing process and data of the items. The second database records correlations of the items between the two data sets. The selecting module selects a first item from a first data set. The analyzing module analyzes the first item selected by the selecting module and determines whether the data of the first item conform to specifications or not. The correlation searching module searches the second database when the analyzing module determines that the data of the first item do not conform to the specifications, and selects a second item correlated to the first item from a second data set. Following that, the analyzing module analyzes the second item and determines whether the data of the second item conform to specifications or not.

Claims

1. A complex multivariate analysis system comprising:

a storage module, which comprising at least

a first database for recording at least two data sets, each of the data sets comprising a plurality of items associated with a manufacturing process and data of the items; and

a second database for recording correlations of the items between the two data sets;

a selecting module for selecting a first item from a first data set recorded in the first database;

an analyzing module for analyzing the first item selected by the selecting module and determining whether the data of the first item conform to specifications or not; and

a correlation searching module for searching the second database when the analyzing module determines that the data of the first item do not conform to the specifications, and selecting a second item correlated to the first item from a second data set recorded in the first database;

wherein the analyzing module further analyzes the second item and determines whether the data of the second item conform to specifications or not.

2. The complex multivariate analysis system of claim 1 further comprisinga reporting module for outputting results made by the analyzing module.

3. The complex multivariate analysis system of claim 1 wherein each of the data sets recorded in the first database comprises the items and the data of the items associated with a semiconductor manufacturing process.

4. The complex multivariate analysis system of claim 3 wherein one of the items associated with the semiconductor manufacturing process comprises equipment parameters.

5. The complex multivariate analysis system of claim 3 wherein one of the items associated with the semiconductor manufacturing process comprises a test item.

6. The complex multivariate analysis system of claim 1 wherein the analyzing module uses statistical methods to analyze the items.

7. The complex multivariate analysis system of claim 1 wherein the analyzing module uses commonality methods to analyze the items.

8. A complex multivariate analyzing method comprising:

selecting a first item from a plurality of items of a first data set associated with a manufacturing process;

analyzing the first item and determining whether the data of the first item conform to specifications or not;

when the data of the first item do not conform to the specifications, selecting a second item correlated to the first item from a plurality of items of a second data set associated with another manufacturing process; and

analyzing the second item and determining whether the data of the second item conform to specifications or not.

9. The complex multivariate analyzing method of claim 8further comprisingoutputting analysis results of the first item and the second item.

10. The complex multivariate analyzing method of claim 8 wherein the data sets are recorded in a first database, and each of the data sets further comprises data of the items, and the correlations of the items between the two data sets are recorded in a second database.

11. The complex multivariate analyzing method of claim 8 wherein the items and the data of the items in each of the data sets are associated with a semiconductor manufacturing process.

12. The complex multivariate analyzing method of claim 11 wherein one of the items associated with the semiconductor manufacturing process comprises equipment parameters.

13. The complex multivariate analyzing method of claim 11 wherein one of the items associated with the semiconductor manufacturing process comprises a test item.

14. The complex multivariate analyzing method of claim 8 wherein the first item is analyzed using statistical methods.

15. The complex multivariate analyzing method of claim 8 wherein the first item is analyzed using commonality methods.

16. The complex multivariate analyzing method of claim 8 wherein the second item is analyzed using statistical methods.

17. The complex multivariate analyzing method of claim 8 wherein the second item is analyzed using commonality methods.