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MEMS sensor for detecting stress corrosion cracking

  • US 20040200295A1
  • Filed: 02/19/2004
  • Published: 10/14/2004
  • Est. Priority Date: 02/28/2003
  • Status: Active Grant
First Claim
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1. A MEMS sensor for measuring stress corrosion cracking of a material of interest, comprising:

  • a substrate;

    an electrically conductive cantilever beam fabricated upon the substrate, the beam having a fixed end attached to the substrate and having a free end, and the beam being made from the material of interest; and

    at least one electrical connection to the beam.

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