Insertion-type liquid metal latching relay array

• US 20040201309A1
• Filed: 04/14/2003
• Published: 10/14/2004
• Est. Priority Date: 04/14/2003
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Fong, Arthur, Wong, Marvin Glenn
• Granted Patent: US 6,879,088 B2
• Time in Patent Office: Days
• US Class Current: 310/328
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 29/18 with level of surface of contact liquid displaced by non-electrical contact-making plunger
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays
• CPC Class Codes: H01H 67/22 Switches without multi-position wipers

Abstract

An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. Each element of the relay array uses an actuator, such as a piezoelectric element, to cause a switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. Insertion of the switch actuator into the cavity causes the conducting liquid to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator. When the switch actuator retracts away from the static switch contact structure, the available volume for conducting liquid inside the fixed switch contact structure increases and the combination of the movement of the conducting liquid into the cavity and the contact pad on the switch actuator moving away from the bulk of the conducting liquid causes the conducting liquid connection between the fixed and moving contact pads to be broken. When the switch actuator returns to its rest position, the contact remains electrically open because there is not enough conducting liquid to bridge the gap without being disturbed. The high frequency capability is provided by the additional conductors in the assembly, which act to make the switch a coaxial structure.

Claims

1. An electrical relay array comprising a plurality of switching elements, a switching of the plurality of switching elements comprising:

a first electrical contact, having a wettable surface;

a first conducting liquid volume in wetted contact with the first electrical contact;

a second electrical contact spaced from the first electrical contact and having a wettable surface;

a well-support structure in close proximity to the first and second electrical contacts, the well support structure having a liquid well formed within it;

a second conducting liquid volume in the liquid well in wetted contact with the second electrical contact; and

an actuator having a rest position at least partially within the liquid well;

wherein expansion of the actuator decreases the volume of the liquid well and displaces the second liquid, thereby causing the first and second conducting liquid volumes to coalesce and complete an electrical circuit between the first and second electrical contacts, and contraction of the actuator increases the volume of the liquid well, thereby causing the first and second conducting liquid volumes to separate and break the electrical circuit.

2. An electrical relay array in accordance with claim 1, further comprising:

a first signal conductor, electrically coupled to the first electrical contact; and

a second signal conductor, electrically coupled to the second electrical contact;

3. An electrical relay array in accordance with claim 2, wherein the second signal conductor provides the well-support structure.

4. An electrical relay in accordance with claim 2, further comprising:

a ground shield, encircling the first and second electrical contacts and the first and second signal conductors;

a first dielectric layer positioned between the ground shield and the first signal conductor, the first dielectric layer electrically insulating the ground shield from the first signal conductor; and

a second dielectric layer positioned between the ground shield and the second signal conductor, the second dielectric layer electrically insulating the ground shield from the second signal conductor.

5. An electrical relay array in accordance with claim 1, wherein the first electrical contact is attached to the actuator.

6. An electrical relay array in accordance with claim 5, wherein expansion of the actuator moves the first electrical contact towards the second electrical contact and contraction of the actuator moves the first electrical contact away from the second electrical contact.

7. An electrical relay array in accordance with claim 1, wherein the actuator comprises one of a piezoelectric actuator and a magnetostrictive actuator.

8. An electrical relay array in accordance with claim 1, wherein the first and second conducting liquid volumes are liquid metal volumes.

9. An electrical relay array in accordance with claim 8, wherein the first and second conducting liquid volumes are mercury.

10. An electrical relay array in accordance with claim 1, wherein the first and second conducting liquid volumes are sized such that coalesced volumes remain coalesced when the actuator is returned to its rest position, and separated volumes remain separated when the actuator is returned to its rest position.

11. An electrical relay array in accordance with claim 1, further comprising a non-wetting coating partially covering the first electrical contact to prevent migration of the conducting liquid along the first electrical contact.

12. An electrical relay array in accordance with claim 1, further comprising:

a circuit substrate supporting electrical connections to the actuator;

a cap layer; and

a switching layer positioned between the circuit substrate and the cap layer and having a channel formed therein;

wherein the first and second electrical contacts and the actuator are positioned within the channel.

13. An electrical relay array in accordance with claim 12, further comprising:

a first signal conductor, electrically coupled to the first electrical contact;

a second signal conductor, electrically coupled to the second electrical contact;

a first end cap supporting electrical connections to the first signal conductor of each relay element; and

a second end cap supporting electrical connections to the second signal conductor of each relay element.

14. An electrical relay array in accordance with claim 13, wherein the electrical connections to the actuator comprise traces deposited on the surface of the lower cap layer and electrically coupled to connections on the one of the first end cap and the second end cap.

15. An electrical relay array in accordance with claim 13, wherein the electrical connections to the actuator comprise traces deposited on the surface of the circuit substrate.

16. An electrical relay array in accordance with claim 13, manufactured by a method of micro-machining.

17. An electrical relay array in accordance with claim 13, wherein the cap layer is fabricated from one of ceramic, glass, metal, silicon and polymer.

18. An electrical relay array in accordance with claim 13, wherein the circuit substrate is fabricated from one of ceramic, glass, silicon and polymer.

19. A method for completing an electrical circuit between a first contact and a second contact selected from a plurality of second contacts in a relay array, the first contact supporting a first conducting liquid droplet and each of the plurality of second contacts supporting a second conducting liquid droplet, the method comprising:

for each second contact of the plurality of second contacts that is not selected;

energizing an actuator to withdraw from a well of conducting liquid, thereby drawing conducting liquid into the well and causing the first and second conducting liquid droplets to separate and break the electrical circuit; and

for the selected second contact;

energizing the actuator to insert into the well of conducting liquid, thereby displacing conducting liquid from the well and causing the first and second conducting liquid droplets to coalesce and complete the electrical circuit.

20. A method in accordance with claim 19, wherein the first contact is attached to the actuator.

21. A method in accordance with claim 20, wherein the first contact is moved towards the second contact when the actuator is inserted in the well and is moved away from the second contact when the actuator is withdrawn from the well.

22. A method in accordance with claim 19, further comprising:

for each second contact of the plurality of second contacts that is not selected;

de-energizing the actuator after the conducting liquid droplets separate; and

for the selected second contact;

de-energizing the actuator after the conducting liquid droplets coalesce.

23. A method in accordance with claim 19, wherein the actuator is a piezoelectric actuator and wherein energizing the actuator comprises applying an electrical voltage across the piezoelectric actuator.

24. A method in accordance with claim 19, wherein the actuator is a magnetostrictive actuator and wherein energizing the actuator comprises applying an electrical voltage to generate an electromagnetic field across the magnetostrictive actuator.