High-frequency, liquid metal, latching relay with face contact

• US 20040201313A1
• Filed: 04/14/2003
• Published: 10/14/2004
• Est. Priority Date: 04/14/2003
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Granted Patent: US 6,876,131 B2
• Time in Patent Office: Days
• US Class Current: 310/328
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

An electrical relay using conducting liquid in the switching mechanism. The relay is amenable to manufacture by micro-machining techniques. In the relay, two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. An actuator is energized to reduce the gap between the electrical contacts, causing the two liquid metal droplets to coalesce and form an electrical circuit. The actuator is then de-energized and the electrical contacts return to their starting positions. The liquid metal droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing an actuator to increase the gap between the electrical contacts and break the surface tension bond between the liquid metal droplets. The droplets remain separated when the piezoelectric actuator is de-energized because there is insufficient liquid metal to bridge the gap between the contacts. Additional conductors are included in the assembly to provide a coaxial structure and allow for high frequency switching.

Claims

1. An electrical relay, comprising:

a first electrical contact, having a wettable surface;

a first signal conductor, electrically coupled to the first electrical contact;

a first conducting liquid droplet in wetted contact with the first electrical contact;

a second electrical contact, spaced from and aligned with the first electrical contact and having a wettable surface facing the wettable surface of the first electrical contact;

a second signal conductor, electrically coupled to the second electrical contact;

a second conducting liquid droplet in wetted contact with the second electrical contact;

a ground shield, encircling the first and second electrical contacts and the first and second signal conductors; and

a first actuator in a rest position, coupled to the first electrical contact and operable to move the first electrical contact towards the second electrical contact, to cause the first and second conducting liquid droplets to coalesce and complete an electrical circuit between the first and second electrical contacts, and away from the second electrical contact, to cause the first and second conducting liquid droplets to separate and break the electrical circuit.

2. An electrical relay in accordance with claim 1, wherein the first actuator is one of a piezoelectric actuator and a magnetorestrictive actuator.

3. An electrical relay in accordance with claim 1, wherein the first and second conducting liquid droplets are liquid metal droplets.

4. An electrical relay in accordance with claim 1, further comprising a second actuator, coupled to the second electrical contact and operable to move the second electrical contact towards the first electrical contact, to cause the first and second conducting liquid droplets to coalesce and complete an electrical circuit, and away from the first electrical contact, to cause the first and second conducting liquid droplets to separate and break the electrical circuit.

5. An electrical relay in accordance with claim 4, wherein the second actuator is one of a piezoelectric actuator and a magnetorestrictive actuator.

6. An electrical relay in accordance with claim 1, wherein the volumes of the first and second conducting liquid droplets are such that coalesced droplets remain coalesced when the actuator is returned to its rest position, and separated droplets remain separated when the actuator is returned to its rest position.

7. An electrical relay in accordance with claim 1, wherein the wettable surfaces of the first and second electrical contacts are stepped.

8. An electrical relay in accordance with claim 1, wherein the first electrical contact is electrically coupled to the first signal conductors by a non-wettable, conductive coating on the first actuator.

9. An electrical relay in accordance with claim 1, further comprising a dielectric layer positioned between the ground shield and the first and second signal conductors, the dielectric layer electrically insulating the ground shield from the first and second signal conductors.

10. An electrical relay in accordance with claim 1, further comprising:

a circuit substrate supporting electrical connections to the first actuator;

a cap layer; and

a switching layer positioned between the circuit substrate and the cap layer and having a channel formed therein;

wherein the ground shield lines the channel and the first actuator, the first and second electrical contacts and the first and second signal conductors are positioned within the channel.

11. An electrical relay in accordance with claim 10, wherein at least one of the electrical connections to the first actuator passes through the circuit substrate and terminates in a solder ball.

12. An electrical relay in accordance with claim 10, wherein the electrical connections to the first actuator comprise traces deposited on the surface of the circuit substrate.

13. An electrical relay in accordance with claim 10, wherein at least one of the electrical connections to the first actuator is deposited on the surface of the circuit substrate and terminates in a wirebond.

14. An electrical relay in accordance with claim 10, manufactured by a method of micro-machining.

15. An electrical relay in accordance with claim 14, wherein a first part of the ground shield is deposited on the inner surface of the cap layer and a second part of the ground shield is deposited on the inner surface of the circuit layer.

16. An electrical relay, comprising:

a ground shield comprising an electrically conducting hollow tube having a first end and a second end;

a first dielectric layer lining the first end of the hollow tube;

a first signal conductor located in the first end of the hollow tube and electrically isolated from the hollow tube by the first dielectric layer;

a first electrical contact, electrically coupled to the first signal conductor;

a second dielectric layer lining the second end of the hollow tube;

a second signal conductor located in the second end of the hollow tube and electrically isolated from the hollow tube by the second dielectric layer;

a second electrical contact, electrically coupled to the second signal conductor;

a first conducting liquid volume in wetted contact with the first electrical contact; and

a second conducting liquid volume in wetted contact with the second electrical contact;

a first actuator within the hollow tube coupled to the first signal conductor at one end and supporting the first electrical contact at the other end and operable to move the first electrical contact towards the second electrical contact, thereby causing the first and second conducting liquid droplets to coalesce and complete an electrical circuit between the first and second electrical contacts; and

a second actuator within the hollow tube coupled to the second signal conductor at one end and supporting the second electrical contact at the other end and operable to move the second electrical contact away from the first electrical contact, thereby causing the first and second conducting liquid droplets to separate and break the electrical circuit.

17. An electrical relay in accordance with claim 16, wherein one of the first and second actuators is a piezoelectric actuator.

18. An electrical relay in accordance with claim 16, wherein one of the first and second actuators is a magnetorestrictive actuator.

19. An electrical relay in accordance with claim 16, wherein the first and second conducting liquid droplets are liquid metal droplets.

20. An electrical relay in accordance with claim 16, wherein the ground shield is contained within a rigid housing.

21. An electrical relay in accordance with claim 16, wherein the first electrical contact is electrically coupled to the first signal conductors by a non-wettable, conductive coating on the first actuator and the second electrical contact is electrically coupled to the second signal conductors by a non-wettable, conductive coating on the second actuator.

22. An electrical relay in accordance with claim 16, wherein the first actuator is operable to move the first electrical contact away from the second electrical contact and the second actuator is operable to move the second electrical contact away from the first electrical contact.