Inserting-finger liquid metal relay

• US 20040201320A1
• Filed: 04/14/2003
• Published: 10/14/2004
• Est. Priority Date: 04/14/2003
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn, Carson, Paul Thomas
• Granted Patent: US 6,903,493 B2
• Time in Patent Office: Days
• US Class Current: 310/328
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 55/00 Magnetostrictive relays
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

An electrical relay comprising having two wettable electrical contacts supporting a conducting liquid. A non-wettable switch finger is moved between first and second positions between the electrical contacts by action of an actuator. In the first position the switch finger permits the conducting liquid to bridge the gap between the contacts and complete an electrical circuit between the contacts. In the second position the switch finger separates the conducting liquid into two volumes, breaking the electrical circuit between the contacts. The switch finger may be located at the free end of a beam that is deflected or bent by the action of piezoelectric elements.

Claims

1. An electrical relay comprising:

a relay housing enclosing a switching cavity;

a first electrical contact in the switching cavity, having a wettable surface;

a second electrical contact in the switching cavity spaced from the first electrical contact and having a wettable surface;

a conducting liquid in wetted contact with the first and second electrical contacts;

a beam having a fixed end attached to the relay housing within the switching cavity and a free end;

a non-wettable switch finger, attached to the free end of the beam and moveable between the first and second electrical contacts; and

a piezoelectric actuator operable to move the beam in a lateral direction to cause the switching finger to move between a first position and second position;

wherein when the switch finger is in the first position, the conducting liquid bridges the space between the first and second contacts and completes an electrical circuit between the first and second contacts and when in the second position the switch finger separates the conducting liquid into two volumes, thereby breaking the electrical circuit between the first and second contacts.

2. An electrical relay in accordance with claim 1, wherein the switch finger is in the first position when the piezoelectric actuator is energized and in the second position when the piezoelectric actuator is not energized.

3. An electrical relay in accordance with claim 1, wherein the switch finger is in the second position when the piezoelectric actuator is energized and in the first position when the piezoelectric actuator is not energized.

4. An electrical relay in accordance with claim 1, further comprising:

a first non-wettable pad positioned between the first electrical contacts and the relay housing; and

a second non-wettable pad positioned between the second electrical contacts and the relay housing.

5. An electrical relay in accordance with claim 1, wherein the piezoelectric actuator comprises a first piezoelectric element attached to a first side of the beam, the first piezoelectric element operable to deform in a longitudinal mode parallel to the beam and thereby bend the beam.

6. An electrical relay in accordance with claim 5, wherein the piezoelectric actuator further comprises a second piezoelectric element attached to a second side of the beam, the second piezoelectric element operable to deform in a longitudinal mode parallel to the beam and thereby bend the beam, wherein the first piezoelectric element is contracted to bend the beam and the second piezoelectric element is extended to bend the beam.

7. An electrical relay in accordance with claim 1, wherein the piezoelectric actuator comprises a piezoelectric element acting between a wall of the switching cavity and a region of the beam between the free end and the fixed end, the piezoelectric element operable to deform in an extensional mode substantially perpendicular to the beam and thereby deflect the beam.

8. An electrical relay in accordance with claim 7, wherein the region of the beam acted upon by the piezoelectric element is closer to the fixed end of the beam than to the free end.

9. An electrical relay in accordance with claim 1, wherein the piezoelectric actuator comprises a stack of piezoelectric elements acting between a wall of the switching cavity and a region of the beam between the free end and the fixed end, the stack of piezoelectric element operable to deform in an extensional mode substantially perpendicular to the beam and thereby deflect the beam.

10. An electrical relay in accordance with claim 1, wherein the first and second electrical contacts are positioned within a recess in the switching cavity, the recess tending to retain the conducting liquid.

11. An electrical relay in accordance with claim 1, wherein the conducting liquid is a liquid metal.

12. An electrical relay in accordance with claim 1, wherein the relay housing comprises:

a substrate layer supporting electrical connections to the first and second electrical contacts and the piezoelectric actuator;

a cap layer; and

a piezoelectric layer positioned between the substrate layer and the cap layer and having the switching cavity formed therein.

13. A method for switching an electrical circuit formed by a bridge of conducting liquid between a first wettable contact and a second wettable contact in an electrical relay, the method comprising:

energizing an actuator to move a non-wettable finger between a first position in which the bridge of conducting liquid is complete and a second position in which the bridge of conducting liquid is broken by the non-wettable finger.

14. A method in accordance with claim 13, wherein energizing the piezoelectric actuator moves the switch finger from the first position to the second position.

15. A method in accordance with claim 13, wherein energizing the piezoelectric actuator moves the switch finger from the second position to the first position.

16. A method in accordance with claim 13, wherein the relay includes a beam having a fixed end and a fixed end, the non-wettable finger being attached to the free end of the beam, and wherein energizing the actuator comprises:

energizing a piezoelectric actuator attached to a side of the beam to deform in a longitudinal direction along the length of the beam, thereby bending the beam and moving the non-wettable finger.

17. A method in accordance with claim 13, wherein the relay includes a beam having a fixed end and a fixed end, the non-wettable finger being attached to the free end of the beam, and wherein energizing the actuator comprises:

energizing a first piezoelectric actuator attached to a first side of the beam to extend in a longitudinal direction along the length of the beam; and

energizing a second piezoelectric actuator attached to a second side of the beam to contract in a longitudinal direction along the length of the beam, thereby bending the beam and moving the non-wettable finger.

18. A method in accordance with claim 13, wherein the relay includes a beam having a fixed end and a fixed end, the non-wettable finger being attached to the free end of the beam, and wherein energizing the actuator comprises:

energizing a piezoelectric actuator in contact with the beam and a housing of the relay to deform in an direction substantially perpendicular to the length of the beam, thereby deflecting the beam and moving the non-wettable finger.

19. A method in accordance with claim 18, wherein the piezoelectric actuator contacts the beam in a region closer to the fixed end than to the free end so as to amplify the motion of the piezoelectric actuator.