Polymeric liquid metal optical switch

• US 20040202404A1
• Filed: 04/14/2003
• Published: 10/14/2004
• Est. Priority Date: 04/14/2003
• Status: Active Grant

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Field, Leslie A., Wong, Marvin Glenn
• Granted Patent: US 6,888,977 B2
• Time in Patent Office: Days
• US Class Current: 385/16
• CPC Class Codes: G02B 26/004 based on a displacement or a deformation of a fluid
• CPC Class Codes: G02B 6/3538 based on displacement or deformation of a liquid controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14
• CPC Class Codes: G02B 6/3574 Mechanical force, e.g. pressure variations
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a liquid metal is disclosed. The relay operates by means of a plurality of shear mode piezoelectric elements used to cause a pressure differential in a pair of fluid chambers. Differential pressure is created in the chambers by contracting and expanding the chambers due to action by the piezoelectric elements. The differential pressure causes the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Claims

1. A piezoelectric activated relay comprising:

a liquid metal channel;

a first and second set of piezoelectric elements, each of said set of piezoelectric elements forming sidewalls to a first and second chamber and each of said chambers being connected to said channel via a first and second conduit respectively;

a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber; and

a moveable conductive liquid within the channel, a first portion of the liquid being wetted to the first of said contact pads and a portion of the liquid wetted to both the second and third of said contact pads;

wherein said chambers and said channel are filled with a fluid and wherein said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads.

2. The piezoelectric activated relay of claim 1 further comprising a fluid reservoir connected to each of said first and second chambers via a first and second through-hole.

3. The piezoelectric activated relay of claim 2 wherein each of said set of piezoelectric elements comprises a pair of shear mode piezoelectric elements that can bend toward or away from the cavity between them.

4. The piezoelectric activated relay of claim 3 wherein said fluid reservoir comprises a plurality of compartments wherein each of said plurality of compartments has compliant walls.

5. The piezoelectric activated relay of claim 4 further comprising a relief port connecting said plurality of compartments.

6. The piezoelectric activated relay of claim 5 wherein said moveable conductive liquid is moveable by pressure differentials created within the first and second fluid chambers caused by activation of at least one set of the piezoelectric elements, said activation of said piezoelectric elements causing said piezoelectric elements to deflect in shear causing them to bend.

7. The piezoelectric activated relay of claim 5 wherein said moveable conductive liquid is moveable by pressure differentials created within the first and second fluid chambers caused by activation of both the first and second set of the piezoelectric elements cooperatively with each other.

8. The piezoelectric activated relay of claim 6 wherein said liquid metal is mercury.

9. The piezoelectric activated relay of claim 6 wherein said liquid metal is an alloy containing gallium.

10. The piezoelectric activated relay of claim 7 wherein said liquid metal is mercury.

11. The piezoelectric activated relay of claim 7 wherein said liquid metal is an alloy containing gallium.

12. The piezoelectric activated relay of claim 7 further comprising a fill port situated above said fluid reservoir.

13. A piezoelectric activated relay comprising:

a fluid reservoir layer comprising a fluid reservoir;

a piezoelectric layer laminated to said fluid reservoir layer, said piezoelectric layer comprising a first and second set of piezoelectric elements, each of said set of piezoelectric elements forming sidewalls to a first and second chamber and each of said chambers being connected to said channel via a first and second conduit respectively;

a liquid metal channel layer laminated to said piezoelectric layer, said channel layer comprising a liquid metal channel, a first via connecting said channel to the first of said chambers, a second via connecting said channel to the second of said chambers, a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber and a moveable conductive liquid within the channel, a first portion of the liquid being wetted to the first of said of contact pads and a portion of the liquid wetted to both the second and third of said contact pads;

wherein said chambers and said channel are filled with a fluid and wherein said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads.

14. The piezoelectric relay of claim 13, wherein each of said first set of piezoelectric elements comprises at least two shear mode piezoelectric elements and said second set of piezoelectric elements comprises at least two shear mode piezoelectric elements.

15. The piezoelectric activated relay of claim 14 wherein said fluid reservoir comprises a single compartment.

16. The piezoelectric activated relay of claim 14 wherein said fluid reservoir comprises a plurality of compartments wherein each of said plurality of compartments has compliant walls.

17. The piezoelectric activated relay of claim 16, further comprising at least one relief port connecting each of said plurality of compartments with adjacent compartments.

18. The piezoelectric activated relay of claim 15 wherein said liquid metal is mercury.

19. The piezoelectric activated relay of claim 17 wherein said liquid metal is an alloy containing gallium.

20. The piezoelectric activated relay of claim 15 wherein said liquid metal is mercury.

21. The piezoelectric activated relay of claim 15 wherein said liquid metal is an alloy containing gallium.

22. The piezoelectric activated relay of claim 20 wherein said reservoir layer further comprises a fill port.

23. The piezoelectric activated relay of claim 21 wherein said reservoir layer further comprises a fill port.