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Closed-loop piezoelectric pump

  • US 20040202558A1
  • Filed: 04/14/2003
  • Published: 10/14/2004
  • Est. Priority Date: 04/14/2003
  • Status: Active Grant
First Claim
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1. A piezoelectric pump comprising:

  • a pump housing;

    a movable diaphragm located within the pump housing and defining a pumping chamber within the pump housing, the pumping chamber having an inlet for admitting fluid into the pumping chamber and an outlet for emitting fluid;

    a piezoelectric transducer coupled to the moveable diaphragm and operable to move the diaphragm and thereby change the volume of the pumping chamber, wherein the piezoelectric transducer is adapted to sense pressure fluctuations in the pumping chamber.

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