Deposition mask for display device and method for fabricating the same

• US 20040202821A1
• Filed: 11/12/2003
• Published: 10/14/2004
• Est. Priority Date: 03/27/2003
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Group)
• Original Assignee: Samsung SDI Company Limited
• Inventors: Kim, Iee-Gon, Kim, Tae-Hyung
• Granted Patent: US 8,273,179 B2
• Time in Patent Office: Days
• US Class Current: 428/137
• CPC Class Codes: B32B 3/266 characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
• CPC Class Codes: B32B 7/04 Interconnection of layers
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 428/24322 Composite web or sheet

Abstract

A mask for depositing a thin film and a method for fabricating the same, which is easy to ensure a positioning accuracy and a pattern size accuracy and is suitable for a high definition display device. The deposition mask of the invention has at least one pattern mask having the same patterns as the patterns that are to be formed on a substrate and a frame mask which has at least one opening. The pattern mask is individually fixed to the frame mask at a region of the frame mask corresponding to the opening.

The deposition mask is fabricated by preparing at least one pattern mask having the same patterns as the patterns that are to be formed on a substrate and a frame mask having at least one opening. The method also involves aligning the pattern mask to the opening of the frame mask and fixing the pattern mask, which is aligned with the opening, to the frame mask.

Claims

1. A deposition mask comprising:

at least one pattern mask having same patterns as patterns that are to be formed on a substrate; and

a frame mask having at least one opening,

wherein the at least one pattern mask is individually fixed to the frame mask such that the at least one pattern mask is exposed via the opening.

2. The deposition mask of claim 1, further comprising:

a frame for supporting the frame mask.

3. The deposition mask of claim 2, wherein the frame mask is made of magnetic metals.

4. The deposition mask of claim 2, wherein the frame and the pattern mask are made of at least one of a metal, metal alloy, and a polymer resin.

5. A method for fabricating a deposition mask, the method comprising the steps of:

preparing at least one pattern mask and a frame mask having at least one opening, wherein the pattern mask has same patterns as patterns that are to be formed on a substrate;

aligning the pattern mask to the opening of the frame mask; and

fixing the pattern mask to the frame mask.

6. The method of claim 5, further comprising the step of fixing individual pattern masks over each opening by repeating the step of aligning and the step of fixing steps.

7. The method of claim 5, wherein fixing the pattern mask to the frame mask is performed by using at least one of a welding and an adhesive.

8. The method of claim 5, wherein the pattern mask is fabricated with an etching method using a photolithography, or an electroforming method using the photolithography or an electrolysis method.

9. The method of claim 5, further comprising the step of fixing the frame mask to a frame after preparing the pattern mask and the frame mask.

10. The method of claim 9, wherein fixing the frame mask to the frame is performed by using at least one of welding or an adhesive.

11. A flat panel display, wherein the flat panel display is fabricated with a deposition mask, where at least one pattern mask having same patterns as patterns that are to be formed on a substrate is aligned and individually fixed to at least one opening of a frame mask.