Feature formation in thick-film inks

• US 20040202844A1
• Filed: 04/14/2003
• Published: 10/14/2004
• Est. Priority Date: 04/14/2003
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Granted Patent: US 7,070,908 B2
• Time in Patent Office: Days
• US Class Current: 428/195.1
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure
• CPC Class Codes: H05K 2203/0568 Resist used for applying paste, ink or powder
• CPC Class Codes: H05K 3/1258 by using a substrate provided with a shape pattern, e.g. grooves, banks, resist pattern
• CPC Class Codes: Y10T 428/24802 Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Abstract

In a method for forming one or more features in a thick-film ink deposited on a substrate, a photoimagable material is used to define a negative of the one or more features on the substrate. A thick-film ink is then deposited on at least part of the substrate, abutting at least some of the photoimagable material. The thick-film ink is cured, and the photoimagable material is removed. One embodiment of the method is used to produce a channel plate. Another embodiment of the method is used to produce a switch.

Claims

1. A method for forming one or more features in a thick-film ink deposited on a substrate, comprising:

a) using a photoimagable material to define negatives of the one or more features on the substrate;

b) depositing a thick-film ink on at least part of the substrate, abutting at least some of the photoimagable material;

c) curing the thick-film ink; and

d) removing the photoimagable material.

2. The method of claim 1, wherein using the photoimagable material to define negatives of the one or more features comprises:

a) depositing the photoimagable material on the substrate;

b) patterning the negatives of the one or more features in the photoimagable material; and

c) removing unwanted portions of the photoimagable material.

3. The method of claim 1, wherein the photoimagable material is a dry film.

4. The method of claim 1, wherein the photoimagable material is a liquid.

5. The method of claim 1, wherein the thick-film ink is deposited by means of spin-coating.

6. The method of claim 1, wherein the thick-film ink is deposited by means of curtain-coating.

7. The method of claim 1, wherein the thick-film ink is deposited by means of doctor blading.

8. The method of claim 1, wherein the thick-film ink is deposited by means of screen printing.

9. The method of claim 1, wherein the thick-film ink is deposited by means of stencil printing.

10. The method of claim 1, wherein curing the thick-film ink comprises drying the thick-film ink.

11. The method of claim 1, wherein curing the thick-film ink comprises firing the thick-film ink.

12. The method of claim 1, wherein the photoimagable material is removed prior to said curing.

13. The method of claim 1, wherein the photoimagable material is removed during said curing.

14. The method of claim 1, wherein the photoimagable material is removed after said curing.

15. The method of claim 1, further comprising, adjusting a thickness of the thick-film ink, subsequent to curing the thick-film ink, by removing a portion of the thick-film ink.

16. The method of claim 1, further comprising, repeating the method to form another feature in another thick-film ink that is deposited on top of the existing thick-film ink.

17. The method of claim 1, further comprising, prior to removing the photoimagable material, repeating said defining, depositing and curing actions to form another feature in another thick-film ink that is deposited on top of the existing thick-film ink.

18. A channel plate, produced by:

a) using a photoimagable material to define a negative of one or more channels on a substrate;

b) depositing a thick-film ink on at least part of the substrate, abutting at least some of the photoimagable material;

c) curing the thick-film ink; and

d) removing the photoimagable material to form the one or more channels.

19. The channel plate of claim 18, further produced by, forming at least one additional channel, in the same manner as the existing one or more channels, in another thick-film ink that is deposited on top of the existing thick-film ink.

20. The channel plate of claim 18, further produced by, prior to said removing action, repeating said defining, depositing and curing actions to form at least one additional channel in another thick-film ink that is deposited on top of the existing thick-film ink.

21. A switch, produced by:

a) using a photoimagable material to define a negative of one or more channels on a substrate;

b) depositing a thick-film ink on at least part of the substrate, abutting at least some of the photoimagable material;

c) curing the thick-film ink;

d) removing the photoimagable material to create a channel plate; and

e) aligning the one or more channels in the channel plate with at least one feature on a substrate, and sealing at least a switching fluid between the channel plate and the substrate.

22. The switch of claim 21, further produced by, forming at least one additional channel, in the same manner as the existing one or more channels, in another thick-film ink that is deposited on top of the existing thick-film ink.

23. The switch of claim 21, further produced by, prior to said removing action, repeating said defining, depositing and curing actions to form at least one additional channel in another thick-film ink that is deposited on top of the existing thick-film ink.