Rotation rate sensor
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Abstract
A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
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Citations
22 Claims
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1-11. -11. (Canceled)
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12. A rotation rate sensor, comprising:
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a substrate;
at least one Coriolis element situated above a surface of the substrate, the at least one Coriolis element being able to be induced to vibrate in parallel to a first axis, wherein;
an excursion of the at least one Coriolis element is detectable based on a Coriolis force in a second axis that is substantially perpendicular to the first axis, and the first axis and the second axis are parallel to the surface of the substrate; and
a force-conveying arrangement for conveying a dynamic force effect between the substrate and the at least one Coriolis element. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification