Slim cell platform plumbing
First Claim
1. A fluid delivery system for a multiple chemistry electrochemical plating platform, comprising:
- a solution mixing system fluidly communicating with a fluid distribution manifold;
a catholyte supply conduit in fluid communication with the manifold and selectively in fluid communication with a plurality of catholyte fluid solution tanks;
an anolyte supply conduit in fluid communication with the manifold and selectively in fluid communication with a plurality of anolyte fluid solution tanks; and
a selectively actuated valve positioned adjacent each of the anolyte and catholyte tanks in the supply conduits.
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Accused Products
Abstract
Embodiments of the invention generally provide a fluid delivery system for an electrochemical plating platform. The fluid delivery system is configured to supply multiple chemistries to multiple plating cells with minimal bubble formation in the fluid delivery system. The system includes a solution mixing system, a fluid distribution manifold in communication with the solution mixing system, a plurality of fluid conduits in fluid communication with the fluid distribution manifold, and a plurality of fluid tanks, each of the plurality of fluid tanks being in fluid communication with at least one of the plurality of fluid conduits.
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Citations
21 Claims
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1. A fluid delivery system for a multiple chemistry electrochemical plating platform, comprising:
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a solution mixing system fluidly communicating with a fluid distribution manifold;
a catholyte supply conduit in fluid communication with the manifold and selectively in fluid communication with a plurality of catholyte fluid solution tanks;
an anolyte supply conduit in fluid communication with the manifold and selectively in fluid communication with a plurality of anolyte fluid solution tanks; and
a selectively actuated valve positioned adjacent each of the anolyte and catholyte tanks in the supply conduits. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A plating solution mixing and delivery system for an electrochemical plating platform, comprising:
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a fluid mixing apparatus, comprising;
a fluid metering pump having a plurality of inputs and at least one output;
base solution container in fluid communication with one of the plurality of inputs;
a plurality of additive containers, each of the plurality of additive containers being in fluid communication with at least one of the inputs; and
a controller in communication with the fluid metering pump, the controller being configured to operate the metering pump such that the base solution and fluid from the plurality of additive containers is mixed in predetermined ratios and dispensed from one of the at least one outputs;
a fluid dispensing manifold in fluid communication with the at least one output;
a an anolyte conduit in fluid communication with the manifold, the anolyte conduit fluidly communicating with an anolyte storage tank;
a catholyte conduit in fluid communication with the mixing manifold, the catholyte conduit fluidly communicating with a catholyte storage tank; and
an electrochemical plating cell having an anolyte compartment and a catholyte compartment, the anolyte compartment being in fluid communication with the anolyte storage tank and the catholyte compartment being in fluid communication with the catholyte storage tank. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A plating solution mixing and delivery system for a multi-chemistry electrochemical plating system, comprising:
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a plating solution mixing assembly positioned onboard the multi-chemistry electrochemical plating system;
at least one catholyte solution tank and at least one anolyte solution tank, each of the anolyte solution tank and the catholyte solution tank being in fluid communication with the plating solution mixing assembly;
a fluid bubble baffle assembly positioned inside the catholyte solution tank; and
a supply line purge valve positioned adjacent each of the catholyte solution tank and the anolyte solution tank in fluid communication with fluid supply return line for the respective tanks, the supply line purge valve being configured to drain fluid from the supply return line after a fluid solution has been delivered to the tank. - View Dependent Claims (19, 20, 21)
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Specification