Method to detect a defective element
First Claim
1. A method to detect one or a plurality of defective pixels in a spatial light modulator, comprising the actions of:
- providing an electromagnetic radiation source to illuminate said spatial light modulator, arranging a reference pattern in said spatial light modulator, illuminating said spatial light modulator, determining a position of a reference pixel in said spatial light modulator by detecting a relayed image of said reference pattern in a detector arrangement, arranging a first pattern in said spatial light modulator, illuminating said spatial light modulator, detecting a relayed image of said first pattern in said detector arrangement, arranging at least a second pattern in said spatial light modulator, illuminating said spatial light modulator, detecting a relayed image of said at least a second pattern in said spatial light modulator analyzing said relayed images of said first pattern and said at least a second pattern to detect differences between said images and theoretical images thereof.
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Abstract
The present invention relates to a method to detect at least one defective pixel in a spatial light modulator comprising numerous pixel elements. The spatial light modulator is imaged to a detector. A relayed image of a first chess-board pattern of pixels in said spatial light modulator is detected by said detector. A relayed image of a second chess-board pattern of pixels in said spatial light modulator is detected, which is inverted to the first chessboard pattern, by said detector. The relayed images of said first and second chessboard patterns are analyzed to detect differences between said detected images and theoretical images thereof.
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Citations
47 Claims
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1. A method to detect one or a plurality of defective pixels in a spatial light modulator, comprising the actions of:
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providing an electromagnetic radiation source to illuminate said spatial light modulator, arranging a reference pattern in said spatial light modulator, illuminating said spatial light modulator, determining a position of a reference pixel in said spatial light modulator by detecting a relayed image of said reference pattern in a detector arrangement, arranging a first pattern in said spatial light modulator, illuminating said spatial light modulator, detecting a relayed image of said first pattern in said detector arrangement, arranging at least a second pattern in said spatial light modulator, illuminating said spatial light modulator, detecting a relayed image of said at least a second pattern in said spatial light modulator analyzing said relayed images of said first pattern and said at least a second pattern to detect differences between said images and theoretical images thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method to detect at least one defective pixel in a spatial light modulator comprising numerous pixel elements, comprising the actions of:
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detecting a relayed image of a first chessboard pattern of pixels in said spatial light modulator by said detector, detecting a relayed image of a second chessboard pattern of pixels in said spatial light modulator, which is inverted to the first chessboard pattern, by said detector, analyzing the relayed images of said first and second chessboard patterns to detect differences between said detected images and theoretical images thereof. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 40)
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31. A method to detect at least one defective pixel in a spatial light modulator, comprising the action of:
making an image of a first chessboard pattern unsharp so that a regular chessboard pattern becomes a uniform background at a detector plane and a defective pixel becomes an irregularity in said uniform background at said plane and detectable by a detector. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 41, 42, 43, 44, 45, 46, 47)
Specification