Method for fabricating an interference display unit
First Claim
1. An optical interference display unit at least comprising:
- a first electrode;
a second electrode, wherein the second electrode is settled in parallel with the first electrode; and
posts located between the first electrode and the second electrode to form a cavity, wherein a thickness of the second electrode is adjusted so that a stress of the second electrode is varied to define a corresponding length of the cavity after treating the second electrode by a thermal process.
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Abstract
An interference display unit with a first electrode, a second electrode and posts located between the two electrodes is provided. The characteristic of the interference display unit is that the second electrode'"'"'s stress is released through a thermal process. The position of the second electrode is shifted and the distance between the first electrode and the second electrode is therefore defined. A method for fabricating the structure described as follow. A first electrode and a sacrificial layer are sequentially formed on a substrate and at least two openings are formed in the first electrode and the sacrificial layer. A supporter is formed in the opening and the supporter may have at least one arm on the top portion of the supporter. A second electrode is formed on the sacrificial layer and the supporter and a thermal process is performed. Finally, The sacrificial layer is removed.
204 Citations
23 Claims
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1. An optical interference display unit at least comprising:
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a first electrode;
a second electrode, wherein the second electrode is settled in parallel with the first electrode; and
posts located between the first electrode and the second electrode to form a cavity, wherein a thickness of the second electrode is adjusted so that a stress of the second electrode is varied to define a corresponding length of the cavity after treating the second electrode by a thermal process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for manufacturing a matrix color optical interference display unit disposed on a substrate, the method comprising:
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forming a first electrode on the substrate;
forming a sacrificial layer on the first electrode;
forming at least four openings in the sacrificial layer and the first electrode to define positions of a first optical interference display unit, a second optical interference display unit, and a third optical interference display unit;
forming a post in each of the openings;
forming at least one first electrode layer on the sacrificial layer and the posts;
forming at least one second electrode layer on the first electrode layer located on the second optical interference display unit and the third optical interference display unit;
forming at least one third electrode layer on the second electrode layer located on the third optical interference display unit;
performing a thermal process; and
removing the sacrificial layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification