Dual wavelength method of determining a relative position of a substrate and a template
First Claim
1. A method of determining a relative position of a substrate and a template spaced-apart therefrom, said substrate having substrate alignment marks disposed thereon and said template having template alignment marks disposed thereon, said method comprising:
- impinging first and second fluxes of light upon said substrate and template alignment marks, with said substrate and template alignment marks being responsive to said first flux of light defining a first response, and being responsive to said second flux of light defining a second response differing from said first response; and
processing said first and second responses to form a focused image of said substrate and template alignment marks on a common plane, with said focused image indicating said relative position of said substrate and said template.
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Abstract
The present invention includes a method of determining a relative position of a substrate and a template spaced-apart therefrom, the substrate having substrate alignment marks disposed thereon and the template having template alignment marks disposed thereon, the method including, impinging first and second fluxes of light upon the substrate and template alignment marks, with the substrate and template alignment marks being responsive to the first flux of light defining a first response, and being responsive to the second flux of light defining a second response differing from the first response; and processing the first and second responses to form a focused image of the substrate and template alignment marks on a common plane, with the focused image indicating the relative position of the substrate and the template.
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Citations
19 Claims
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1. A method of determining a relative position of a substrate and a template spaced-apart therefrom, said substrate having substrate alignment marks disposed thereon and said template having template alignment marks disposed thereon, said method comprising:
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impinging first and second fluxes of light upon said substrate and template alignment marks, with said substrate and template alignment marks being responsive to said first flux of light defining a first response, and being responsive to said second flux of light defining a second response differing from said first response; and
processing said first and second responses to form a focused image of said substrate and template alignment marks on a common plane, with said focused image indicating said relative position of said substrate and said template. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of determining a relative position of a substrate and a template spaced-apart therefrom, said substrate having substrate alignment marks disposed thereon and said template having template alignment marks disposed thereon, said method comprising:
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impinging a first flux of light upon said substrate and template alignment marks, with said substrate alignment marks forming a first image and said template alignment marks forming a second image;
impinging a second flux of light upon said substrate and template alignment marks, with said substrate alignment marks forming a third image and said template alignment marks forming a fourth image; and
optically filtering said first, second, third, and fourth images to produce a focused image of said substrate and template alignment marks on a common plane, with said focused image indicating said relative position of said substrate and said template. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method of determining a relative position of a substrate and a template spaced-apart therefrom, said substrate having substrate alignment marks disposed thereon and said template having template alignment marks disposed thereon, said method comprising:
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impinging first and second fluxes of light upon said substrate and template alignment marks, with said substrate alignment marks forming a first in-focus image and said template alignment marks forming a first out-of-focus image with respect to said first flux of light, and said substrate alignment marks forming a second out-of-focus image and said template alignment marks forming a second in-focus image with respect to said second flux of light; and
eliminating geometric data corresponding to said first and second out-of-focus images to position said first and second in-focus image on a common plane, with said first and said in-focus image indicating said relative position of said substrate and said template. - View Dependent Claims (18, 19)
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Specification