Manufacturing method and manufacturing device of display device

• US 20040212774A1
• Filed: 04/28/2004
• Published: 10/28/2004
• Est. Priority Date: 04/28/2003
• Status: Active Grant

• Current Assignee: Panasonic Liquid Crystal Display Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Hitachi Displays Limited (Japan Display Incorporated)
• Inventors: Yamazaki, Hisao, Igarashi, Mitsuru
• Granted Patent: US 7,079,216 B2
• Time in Patent Office: Days
• US Class Current: 349/187
• CPC Class Codes: B65G 2249/04 Arrangements of vacuum systems or suction cups
• CPC Class Codes: C03B 33/033 Apparatus for opening score lines in glass sheets
• CPC Class Codes: C03B 33/07 Cutting armoured, multi-layered, coated or laminated, glass products
• CPC Class Codes: C03B 33/10 Glass-cutting tools, e.g. scoring tools
• CPC Class Codes: G02F 1/133351 Manufacturing of individual cells out of a plurality of cells, e.g. by dicing

Abstract

Stacked mother substrates are efficiently separated into individual display device substrate-units by a scribing and breaking method. In a state in which the transported stacked mother substrates PN are held in a raised state, scribe lines SBL1, SBL2 are formed on a first substrate SUB1 and a second substrate SUB2 at the same position. Then, first of all, the stacked mother substrates are broken into strip-like substrates by breaking a periphery and removing a peripheral wastage and, thereafter, the strip-like substrates are broken into display device substrate-units PNL and, thereafter, internal wastages of the respective display device substrate-units PN are separated and removed.

Claims

1. A manufacturing method of a display device comprising;

a raising step of a workpiece in which the workpiece including a first substrate and a second substrate which are laminated to each other in an opposingly facing manner and at least one display region formed between the first and the second substrates is raised such that an angle which a main surface of the workpiece makes with respect to the direction of gravity is decreased;

a first scribing step in which a first scribe line is formed on the main surface of the first substrate,

a first breaking step in which the first substrate is broken along the first scribe line by bending the workpiece toward the second substrate side;

a second scribing step in which a second scribe line is formed on the main surface of the second substrate; and

a second breaking step in which the second substrate is broken along the second scribe line by bending the workpiece toward the first substrate side are sequentially performed in this order, wherein

a portion of the workpiece where at least one display region is formed and another portion close to the portion are separated from each other.

2. A manufacturing method of a display device according to claim 1, wherein another portion close to the portion of the workpiece where at least one display region is formed is thrown away as wastage.

3. A manufacturing method of a display device according to claim 1, wherein a separate display region is formed on another portion close to the portion of the workpiece where at least one display region is formed

4. A manufacturing method of a display device according to claim 1, wherein after the completion of the second breaking step, either one of a series of flow consisting of the first scribing step, the first breaking step, the second scribing step and the second breaking step and a series of flow consisting of the second scribing step, the second breaking step, the first scribing step and the first breaking step is repeated.

5. A manufacturing method of a display device according to claim 4, wherein after the completion of the second breaking step, the workpiece is rotated within a main surface thereof and, thereafter, either one of the series of steps which succeed the second breaking step are started.

6. A manufacturing method of a display device comprising:

a step of preparing a workpiece which includes a first substrate and a second substrate which are laminated to each other in an opposing manner, a display region which is formed between the substrates, and electrodes which supply signal or electricity to the display region formed on a second-substrate-side main surface of the first substrate, and further includes a terminal region arranged close to the display region, wherein the electrodes are covered with the second substrate,

a step which clamps the workpiece at the display region and the terminal region respectively,

a step which forms a scribe line on a portion of the main surface of the second substrate corresponding to a boundary between the display region and the terminal region,

a step which breaks the second substrate along the scribe line by bending the workpiece toward the first substrate side, and

a step which pushes the terminal-region-side portion of the second substrate which is broken along the scribe line toward the first substrate side at one side opposite to the display region of the terminal-region side portion so as to peel off the terminal-region-side portion of the second substrate from the first substrate and the display-region-side portion of the second substrate.

7. A manufacturing method of a display device according to claim 6, wherein after the step of peeling off the terminal-region-side portion of the second substrate, the workpiece is rotated within the main surface of the workpiece and, thereafter, a series of steps ranging from the step which clamps the workpiece at the display region and the terminal region respectively to the step which peels off the terminal-region-side portion of the second substrate are repeated.

8. A manufacturing method of a display device comprising:

a step of raising stacked mother substrates by slightly inclining the stacked mother substrates which are introduced horizontally with respect to the vertical direction,

a first scribing step in which a plurality of scribe lines which extend in the first direction and in the second direction which intersects the first direction on a surface of the first substrate included in the stacked mother substrates corresponding to respective boundaries of the wastage portions and a plurality of display device substrates-unit portions arranged within a main surface of the stacked mother substrates are formed,

a second scribing step in which a plurality of second scribe lines which respectively opposingly face the plurality of first scribe lines are formed on a surface of the second substrate which is included in the stacked mother substrates and opposingly faces the first substrate,

a first breaking step in which the stacked mother substrates are broken along the plurality of first scribe lines and the plurality of second scribe lines close to the wastage portion out of the plurality of first scribe lines and the plurality of second scribe lines, and the wastage portion is separated from the stacked mother substrate on which the plurality of display device substrates-unit portions are formed,

a second breaking step in which the stacked mother substrates from which the wastage portion is cut out are broken along the first scribe line and the second scribe line which extend in the first direction out of the first scribe lines and the second scribe lines, one of the plurality of display device substrates-unit portions and another display device substrates-unit portion which is arranged close to one display device substrates-unit portion are separated along the second direction, and strip-like stacked substrates which include at least one of the plurality of display device substrates-unit portions and extend in the first direction are separated;

a third breaking step in which the strip-like stacked substrates are broken by the first scribe line and the second scribe line which extend in the second direction out of the first scribe lines and the second scribe lines and the display device substrates-unit portions formed on the strip-like stacked substrates are cut out,

a third scribing step in which, on an end portion of a main surface of one of the first substrate and the second substrate included in the separated display device substrates-unit portions, a third scribe line and a fourth scribe line are formed along two neighboring sides, and

a fourth breaking step in which one of the first substrate and the second substrate is broken along the third scribe lines and a periphery of the broken substrate which is arranged along one of two sides is separated as wastage, and

a fifth breaking step in which one of the first substrate and the second substrate along a fourth scribe line and a periphery of the broken substrate which is arranged along another of two sides is separated as wastage

are sequentially performed while maintaining the stacked mother substrates, the strip-like stacked substrates and the display device substrates-units in a raised state respectively.

9. A manufacturing method of a display device comprising:

a raising step of a workpiece in which the workpiece including a first substrate and a second substrate which are laminated to each other in an opposingly facing manner and at least one display region formed between the first and the second substrates is raised such that an angle which a main surface of the workpiece makes with respect to the direction of gravity is decreased;

a first scribing step in which a first scribe line is formed on the main surface of the first substrate;

a first breaking step which is performed substantially simultaneously with or following the first scribing step and in which the first substrate is broken along the first scribe line by pushing the first substrate from a main surface side of the second substrate along the first scribe line;

a second scribing step in which a second scribe line is formed on the main surface of the second substrate;

a second breaking step which is performed substantially simultaneously with or following the second scribing step and in which the second substrate is broken along the second scribe line by pushing the second substrate from a main surface side of the first substrate along the second scribe line, wherein

a portion where the at least one display region of the workpiece is formed and a portion which is arranged close to the portion are separated from each other.

10. A manufacturing method of a display device according to claim 9, wherein the scribing step and the breaking step are performed substantially in parallel at the first substrate and the second substrate.

11. A manufacturing method of a display device according to claim 9 or claim 10, wherein another portion close to the portion where at least one display region is formed is thrown away as wastage.

12. A manufacturing method of a display device according to claim 9, wherein a separate display region is formed on another portion close to the portion of the workpiece where at least one display region is formed.

13. A manufacturing method of a display device according to claim 9, wherein after the completion of the second breaking step, either one of a series of flow consisting of the first scribing step, the first breaking step, the second scribing step and the second breaking step and a series of flow consisting of the second scribing step, the second breaking step, the first scribing step and the first breaking step is repeated.

14. A manufacturing method of a display device according to claim 13, wherein after the completion of the second breaking step, the workpiece is rotated within a main surface thereof and, thereafter, either one of the series of steps which succeed the second breaking step are started.

15. A manufacturing method of a display device comprising:

a step of preparing a workpiece which includes a first substrate and a second substrate which are laminated to each other in an opposing manner, a display region which is formed between the substrates, and electrodes which supply signal or electricity to the display region formed on a second-substrate-side main surface of the first substrate, and further includes a terminal region arranged close to the display region, wherein the electrodes are covered with the second substrate,

a step which clamps the workpiece at the display region and the terminal region respectively,

a first scribing step which forms a scribe line on a portion of the main surface of the second substrate corresponding to a boundary between the display region and the terminal region,

a step which breaks the second substrate along the scribe line by pushing the second substrate from the first substrate side along the scribe line formed on the workpiece substantially simultaneously with or following the first scribing step, and

a step which pushes the terminal-region-side portion of the second substrate which is broken along the scribe line toward the first substrate side at one side opposite to the display region of the terminal region-side portion so as to peel off the terminal-region-side portion of the second substrate from the first substrate and the display-region-side portion of the second substrate.

16. A manufacturing method of a display device according to claim 15, wherein after the step of peeling off the terminal-region-side portion of the second substrate, the workpiece is rotated within the main surface of the workpiece and, thereafter, a series of steps ranging from the step which clamps the workpiece at the display region and the terminal region respectively to the step which peels off the terminal-region-side portion of the second substrate are repeated.

17. A manufacturing method of a display device in which

a step of raising stacked mother substrates by slightly inclining the stacked mother substrates which are introduced horizontally with respect to the vertical direction;

a first scribing step in which a plurality of scribe lines which extend in the first direction and in the second direction on a surface of the first substrate included in the stacked mother substrates corresponding to respective boundaries of the wastage portions and a plurality of display device substrates-unit portions arranged within a main surface of the stacked mother substrates are formed;

a first breaking step which breaks the first substrate along the plurality of first scribe lines by pushing the second substrate from the main surface side of the second substrate along the plurality of first scribe lines substantially simultaneously with or following the first scribing step;

a second scribing step which forms a plurality of second scribe lines which respectively opposingly face the plurality of first scribe lines on a surface of the second substrate which is included in the stacked mother substrates and opposingly faces the first substrate;

a second breaking step which breaks the second substrate along the plurality of second scribe lines by pushing the second substrate from the main surface side of the first substrate along the plurality of second scribe lines substantially simultaneously with or following the second scribing step;

a third breaking step which breaks the stacked mother substrates along the first scribe lines and the second scribe lines which are arranged close to the wastage portions among the plurality of first scribe lines and the plurality of second scribe lines respectively, and the wastage portions are separated from the stacked mother substrates on which the plurality of display device substrates-unit portions;

a fourth breaking step which breaks the stacked mother substrates from which the wastage portions are cut away along the respective extensions of the first scribe lines and the second scribe lines in the first direction, and one of the plurality of display device substrates-unit portions and another of the plurality of display device substrates-units which is arranged close to the one of the plurality of display device substrates-units are separated from each other thus separating strip-like stacked substrates which includes at least one of the display device substrates-unit portions and extend in the first direction;

a fifth breaking step in which the strip-like stacked substrates are broken along the respective extensions in the second direction of the first scribe line and the second scribe line and cuts out the display device substrates-unit portions by breaking;

a third scribing step in which on one main surface end portion of one of the first substrate and the second substrate which are included in the separated display device substrates-unit, a third scribe line and a fourth scribe line which are arranged along two neighboring sides of the one main surface end portion are formed respectively,

a sixth breaking step which promotes cleaving of the third and the fourth scribe lines by pushing from the main surface side of another substrate out of the first substrate and the second substrate along the third and fourth scribe lines substantially simultaneously with or following the third scribing step;

a seventh breaking step which breaks one of the first substrate and the second substrate along the third scribe line and separates a periphery which is arranged along one of two sides as a wastage; and

an eighth breaking step which breaks one of the first substrate and the second substrate along the fourth scribe line and separates a periphery which is arranged along another of two sides as a wastage

are sequentially performed while holding the stacked mother substrate, the strip-like stacked substrate and the display-device substrates-unit in a raised state respectively.

18. A manufacturing method of a display device comprising:

a raising step of a workpiece in which the workpiece including a first substrate and a second substrate which are laminated to each other in an opposingly facing manner and at least one display region formed between the first and the second substrates is raised such that an angle which a main surface of the workpiece makes with respect to the direction of gravity is decreased;

a first scribing step in which a first scribe line is formed on the main surface of the first substrate;

a first pushing step which is performed substantially simultaneously with or following the first scribing step and in which cleaving of the first scribe line on the first substrate is promoted by pushing the first substrate from a main surface side of the second substrate along the first scribe line;

a first breaking step which breaks the first substrate along the first scribe line;

a second scribing step in which a second scribe line is formed on the main surface of the second substrate; and

a second pushing step which is performed substantially simultaneously with or following the second scribing step and in which cleaving of the second scribe line on the second substrate is promoted by pushing the second substrate from a main surface side of the first substrate along the second scribe line;

wherein

the manufacturing method includes a second breaking step which breaks the second substrate along the second scribe line, and

a portion where the at least one display region of the workpiece is formed and a portion which is arranged close to the portion are separated from each other.

19. A manufacturing method of a display device according to claim 18, wherein the scribing step and the pushing step are performed substantially in parallel at the first substrate and the second substrate.

20. A manufacturing method of a display device according to claim 18, wherein another portion close to the portion where at least one display region is formed is thrown away as wastage.

21. A manufacturing method of a display device according to claim 18, wherein a separate display region is formed on another portion close to the portion of the workpiece where at least one display region is formed.

22. A manufacturing method of a display device according to claim 18, wherein after the completion of the second breaking step, either one of a series of flow consisting of the first scribing step, the first pushing step, the first breaking step, the second scribing step, the second pushing step and the second breaking step and a series of flow consisting of the second scribing step, the second pushing step, the second breaking step, the first scribing step, the first pushing step and the first breaking step is repeated.

23. A manufacturing method of a display device according to claim 22, wherein after the completion of the second breaking step, the workpiece is rotated within a main surface thereof and, thereafter, either one of the series of steps which succeed the second breaking step is started.

24. A manufacturing method of a display device comprising:

a step of preparing a workpiece which includes a first substrate and a second substrate which are laminated to each other in an opposing manner, a display region which is formed between the substrates, and electrodes which supply signal or electricity to the display region formed on a second-substrate-side main surface of the first substrate, and further includes a terminal region arranged close to the display region, wherein the electrodes are covered with the second substrate,

a step which clamps the workpiece at the display region and the terminal region,

a first scribing step which forms a scribe line on a portion of the main surface of the second substrate corresponding to a boundary between the display region and the terminal region,

a first pushing step which promotes cleaving of the scribe lines by pushing the second substrate from the first substrate side along the scribe line formed on the workpiece substantially simultaneously with or following the first scribing step,

a first breaking step which breaks the second substrate along the scribe lines, and

a step which pushes the terminal-region-side portion of the second substrate which is broken along the scribe line toward the first substrate side at one side opposite to the display region of the terminal-region-side portion so as to peel off the terminal-region-side portion of the second substrate from the first substrate and the display-region-side portion of the second substrate.

25. A manufacturing method of a display device according to claim 24, wherein after the step of peeling off the terminal-region-side portion of the second substrate, the workpiece is rotated within the main surface of the workpiece and, thereafter, a series of steps ranging from the step which clamps the workpiece at the display region and the terminal region respectively to the step which peels off the terminal-region-side portion of the second substrate are repeated.

26. A manufacturing method of a display device in which

a step of raising stacked mother substrates by slightly inclining the stacked mother substrates which are introduced horizontally with respect to the vertical direction;

a first scribing step in which a plurality of scribe lines which extend in the first direction and in the second direction which intersect the first direction on a surface of the first substrate included in the stacked mother substrates corresponding to respective boundaries of the wastage portions and a plurality of display device substrates-unit portions arranged within a main surface of the stacked mother substrates;

a first pushing step which promotes cleaving of the first scribe line by pushing the first substrate from the main surface side of the second substrate along the plurality of first scribe lines substantially simultaneously with or following the first scribing step;

a first breaking sep which breaks the first substrate along the plurality of first scribe lines;

a second scribing step which forms a plurality of second scribe lines which respectively opposingly face the plurality of first scribe lines on a surface of the second substrate which is included in the stacked mother substrates and opposingly face the first substrate;

a second pushing step which promotes cleaving of the second scribe line by pushing the second substrate from the main surface side of the first substrate along the plurality of second scribe lines substantially simultaneously with or following the second scribing step;

a second breaking step which breaks the second substrate along the plurality of second scribe lines;

a third breaking step which breaks the stacked mother substrates along the plurality of first scribe lines and the plurality of second scribe lines which are arranged close to the wastage portions among the plurality of first scribe lines and the plurality of second scribe lines respectively, and the wastage portions are separated from the stacked mother substrates on which the plurality of display device substrates-unit portions are formed;

a fourth breaking step which breaks the stacked mother substrates from which the wastage portions are cut away along the respective extensions of the first scribe lines and the second scribe lines in the first direction, and one of the plurality of display device substrates-unit portions and another of the plurality of display device substrates-unit portions which is arranged close to the one of the plurality of display device substrates-units are separated from each other along the second direction thus separating strip-like stacked substrates which include at least one of the plurality of display device substrates-unit portions and extends in the first direction;

a fifth breaking step in which the strip-like stacked substrates are broken along the respective extensions in the second direction of the first scribe line and the second scribe line and cuts out the display device substrates-units;

a third scribing step in which on one main surface end portion of one of the first substrate and the second substrate which are included in the separated display device substrates-unit, a third scribe line and a fourth scribe line which are arranged along two neighboring sides of the one main surface end portion are formed,

a third pushing step which promotes cleaving of the third and the fourth scribe lines by pushing from the main surface side of another substrate out of the first substrate and the second substrate along the third and fourth scribe lines substantially simultaneously with or following the third scribing step;

a sixth breaking step which breaks one of the first substrate and the second substrate along the third scribe line and separates a periphery which is arranged along one of two sides as a wastage; and

a seventh breaking step which breaks one of the first substrate and the second substrate along the fourth scribe line and separates a periphery which is arranged along another of two sides as a wastage

are sequentially performed while holding the stacked mother substrate, the strip-like stacked substrate and the display-device substrates-unit in a raised state respectively.

27. A manufacturing device of a display device comprising:

a transport mechanism which transports a workpiece which has two main surfaces spreading in the first direction and in the second direction which intersect the first direction and forms at least one display region within the main surfaces in the first direction;

a first holding mechanism which includes a pair of jigs which are respectively brought into contact with two main surfaces of the workpiece and clamps the workpiece with the pair of jigs;

a second holding mechanism which is arranged parallel to the first holding mechanism along the first direction and includes a pair of jigs which are respectively brought into contact with two main surfaces of the workpiece and clamps the workpiece with the pair of jigs; and

a scribing mechanism which moves along the third direction which intersects the first direction and the second direction between the first holding mechanism and the second holding mechanism and forms scribe lines on either one of two main surfaces of the workpiece, wherein

the respective pairs of jigs which are provided to the first holding mechanism and the second holding mechanism respectively conduct the translational motions on a plane which spreads in the first direction and the third direction, and

the respective jigs which are provided to at least one of the first holding mechanism and the second holding mechanism conduct the rotational motions on the plane which spreads in the first direction and the third direction.

28. A manufacturing device of a display device according to claim 27, wherein the jigs are formed in a bar shape which extends in the second direction and is brought into contact with the main surface of the workpiece.

29. A manufacturing device of a display device according to claim 27, wherein the scribing mechanism includes a marking-off needle or a scribing wheel which moves in the second direction.

30. A manufacturing device of a display device according to claim 27, wherein the manufacturing device includes a stage which holds or sucks one of the main surfaces of the workpiece, and further includes a rotating mechanism which rotates the workpiece within a plane which spreads along the first direction and along the second direction.

31. A manufacturing device of a display device according to claim 27, wherein at least one of the pair of jigs which are provided to at least one of the first holding mechanism and the second holding mechanism performs a plurality kinds of rotational motions about a plurality of respective axes which extend in the second direction on a plane which spreads in the first direction and the third direction.

32. A manufacturing device of a display device according to claim 27, wherein the transport mechanism includes a belt conveyor which supports the workpiece on one side thereof along the first direction and transports the workpiece in the first direction and a surface table which is arranged parallel to the belt conveyor along the third direction and has a main surface which opposingly faces one of two main surfaces of the workpieces, openings which blow off air to one main surface of the workpiece is formed in the main surface of the surface table, and the transfer mechanism which transports the workpiece in a state that the workpiece is raised in the direction of gravity and one main surface of the workpiece floats over the main surface of the surface table by the belt conveyor and the surface table.

33. A manufacturing device of a display device comprising:

a transport mechanism which transports a workpiece which has two main surfaces spreading in the first direction and in the second direction which intersects the first direction and forms at least one display region within the main surfaces in the first direction;

a first holding mechanism which includes a pair of jigs which are respectively brought into contact with two main surfaces of the workpiece and clamps the workpiece with the pair of jigs;

a second holding mechanism which is arranged parallel to the first holding mechanism and includes a pair of jigs which are respectively brought into contact with two main surfaces of the workpiece along the first direction and clamps the workpiece with the pair of jigs;

a scribing mechanism which moves along the third direction which intersects the first direction and the second direction between the first holding mechanism and the second holding mechanism and forms scribe lines on either one of two main surfaces of the workpiece; and

a pushing mechanism which is arranged to face the scribing mechanism with the workpiece therebetween in an opposing manner between the first holding mechanism and the second holding mechanism, moves in the third direction which intersects the first direction and the second direction respectively, and promotes cleaving of the scribe lines by pushing the scribe lines formed on one main surface of the workpiece from another surface side, wherein

the respective pairs of jigs which are provided to the first holding mechanism and the second holding mechanism respectively conduct the translational motions on a plane which spreads in the first direction and the third direction, and

the respective jigs which are provided to at least one of the first holding mechanism and the second holding mechanism conduct the rotational motions on the plane which spreads in the first direction and the third direction.

34. A manufacturing device of a display device according to claim 33, wherein the jigs are formed in a bar shape which extends in the second direction and is brought into contact with the main surface of the workpiece.

35. A manufacturing device of a display device according to claim 33, wherein the scribing mechanism includes a marking-off needle or a scribing wheel which moves in the second direction.

36. A manufacturing device of a display device according to claim 33, wherein the pushing mechanism includes a breaking roller.

37. A manufacturing device of a display device according to claim 33, wherein the pushing mechanism includes a breaking roller and a breaking assist roller which is arranged to face the breaking roller with the workpiece therebetween in an opposing manner.

38. A manufacturing device of a display device according to claim 33, wherein the pushing mechanism includes a marking-off needle or a scribing wheel and a reaction force suppressing scribing assist roller which is arranged to face the marking-off needle or the scribing wheel with the workpieces in an opposing manner.

39. A manufacturing device of a display device according to claim 33, wherein the manufacturing device includes a stage which holds or sucks one of the main surfaces of the workpiece, and further includes a rotating mechanism which rotates the workpiece within a plane which spreads along the first direction and along the second direction.

40. A manufacturing device of a display device according to claim 33, wherein at least one of the pair of jigs which are provided to at least one of the first holding mechanism and the second mechanism performs a plurality kinds of rotational motions about a plurality of respective axes which extend in the second direction on a plane which spreads in the first direction and the third direction.

41. A manufacturing device of a display device according to claim 33, wherein the transport mechanism includes a belt conveyor which supports the workpiece on one side thereof along the first direction and transports the workpiece in the first direction and a surface table which is arranged parallel to the belt conveyor along the third direction and has a main surface which opposingly faces one of two main surfaces of the workpieces, openings which blow off air to one main surface of the workpiece is formed in the main surface of the surface table, and the transfer mechanism which transports the workpiece in a state that the workpiece is raised in the direction of gravity and one main surface of the workpiece floats over the main surface of the surface table by the belt conveyor and the surface table.