Single mode vertical cavity surface emitting laser
First Claim
1. An optoelectronic device, comprising:
- a substrate having upper and lower surfaces;
a lower mirror portion disposed upon the upper surface of the substrate;
an active region disposed proximate the lower mirror portion;
an upper mirror portion disposed proximate the active region and substantially comprising an electrically isotropic material;
a substantially equipotential layer disposed proximate the upper mirror portion; and
an insulating layer arranged between the upper mirror portion and the substantially equipotential layer and at least partially defining an aperture.
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Accused Products
Abstract
Optoelectronic devices are disclosed, an example of which is a vertical cavity surface emitting lasers (“VCSEL”) configured to emit in a single transverse mode. One exemplary VCSEL includes a substrate with upper and lower surfaces, where a lower mirror portion is disposed upon the upper surface of the substrate. An active region of the VCSEL is bounded on one side by the lower mirror portion, and on the other side by an upper mirror portion that substantially comprises an electrically isotropic material. In addition, the VCSEL includes a substantially equipotential layer disposed on the upper mirror portion, and an insulating layer arranged between the upper mirror portion and the substantially equipotential layer and defining an aperture. Among other things, such configurations enable single, lowest order, mode operation over a range of operating currents, while also providing for suppression or elimination of higher order modes.
126 Citations
38 Claims
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1. An optoelectronic device, comprising:
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a substrate having upper and lower surfaces;
a lower mirror portion disposed upon the upper surface of the substrate;
an active region disposed proximate the lower mirror portion;
an upper mirror portion disposed proximate the active region and substantially comprising an electrically isotropic material;
a substantially equipotential layer disposed proximate the upper mirror portion; and
an insulating layer arranged between the upper mirror portion and the substantially equipotential layer and at least partially defining an aperture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A vertical cavity surface emitting laser (VCSEL), comprising:
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a substrate having upper and lower surfaces;
a lower mirror portion disposed upon the substrate;
an active region disposed above the lower mirror portion;
an upper mirror portion disposed above the active region and substantially comprising an electrically isotropic material;
a substantially equipotential layer disposed upon the upper mirror portion;
at least one heat conduction layer arranged between the substrate and the substantially equipotential layer; and
an insulating layer arranged between the upper mirror portion and the substantially equipotential layer and at least partially defining an aperture. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification