Adhesive of a silicon and silica composite particularly useful for joining silicon parts
First Claim
1. A method of joining two silicon parts along respective joining areas, comprising the step:
- providing a flowable mixture of a silicon powder and a silica bridging agent;
applying said flowable mixture to at least one of said joining areas;
assembling said two silicon parts with said respective joining areas in juxtaposition; and
annealing said assembled parts at an annealing temperature sufficient to convert said silica bridging agent to a silica network.
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Accused Products
Abstract
A method of joining two silicon members, the adhesive used for the method, and the joined product, especially a silicon tower for supporting multiple silicon wafers. A flowable adhesive is prepared comprising silicon particles of size less than 100 μm and preferably less than 100 nm and a silica bridging agent, such as a spin-on glass. Nano-silicon crystallites of about 20 nm size may be formed by CVD. Larger particles may be milled from virgin polysilicon. If necessary, a retardant such as a heavy, preferably water-insoluble alcohol such as terpineol is added to slow setting of the adhesive at room temperature. The mixture is applied to the joining areas. The silicon parts are assembled and annealed at a temperature sufficient to link the silica, preferably at 900° C. to 1100° C. for nano-silicon but higher for milled silicon.
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Citations
32 Claims
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1. A method of joining two silicon parts along respective joining areas, comprising the step:
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providing a flowable mixture of a silicon powder and a silica bridging agent;
applying said flowable mixture to at least one of said joining areas;
assembling said two silicon parts with said respective joining areas in juxtaposition; and
annealing said assembled parts at an annealing temperature sufficient to convert said silica bridging agent to a silica network. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A joined silicon assembly, comprising:
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at least two silicon parts juxtaposed across respective pairs of joining areas separated by respective gaps; and
a composite bridging said gaps and comprising silicon crystallites having sizes of less than 100 μ
m embedded in a matrix of silica. - View Dependent Claims (20, 21)
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22. A substrate support fixture, comprising:
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a plurality of silicon legs including teeth for supporting a plurality of substrate in parallel orientations;
two silicon bases joined to opposing ends of said legs across respective joints with respective gaps between a respective one of said bases and a respective one of said legs;
silicon crystallites having sizes of less than 100 μ
m occupying at least 50% of said gaps; and
a silica network in each of said gaps joining said silicon crystallites and said legs and said bases. - View Dependent Claims (23, 24, 25)
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26. A silicon support tower, comprising:
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two silicon bases; and
at least three silicon legs joined to said bases, each comprising on a front side a plurality of teeth having support surfaces for supporting a plurality of substrates in parallel orientation and on a back side an arcuate surface about a median plane of said teeth matching arcuate surfaces formed in said bases. - View Dependent Claims (27)
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28. An adhesive for joining two parts, comprising a mixture flowable a room-temperature application temperature composed of:
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silicon particles having sizes of less than 100 μ
m; and
a silica bridging agent in which said particles are dispersed and which chemically reacts to form a silica network when annealed at an elevated temperature above said application temperature. - View Dependent Claims (29, 30, 31, 32)
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Specification