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Semiconductor fabricating apparatus

  • US 20040214435A1
  • Filed: 02/06/2004
  • Published: 10/28/2004
  • Est. Priority Date: 02/07/2003
  • Status: Active Grant
First Claim
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1. A semiconductor fabricating apparatus having a resonant frequency sensor disposed in a processing chamber, wherein a change in the resonant frequency of said resonant frequency sensor is detected in order to determine the maintenance timing.

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